60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

Plug-in/Plug Lead: Single Unit

Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2. Note2) For thread standard, refer to page 2-6-39.

Series AP500

Vespel is a registered trademark of DuPont. 9 Low to intermediate flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1900 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AP19 S FV4 FV4 01 2PW

Information

L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

AMD

Port size AMD550 AMD650 AMD850 01 B 06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange

Large Size Vacuum Module: Series ZR

AC voltage: S is not available for AC.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

12.8 S 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S ZPR F-0-B8 (Without buffer/Female thread) 40 50 20 to 32 12.8 26.2 S Hexagon width across flats 12 N 8 R F Applicable tubing O.D.Q E D C Y 2.5 A B Dimensions (mm) A B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by Tubing Diameter (mm) Q: 6

Digital Flow Switch (Remote type monitor unit)

(at 80 mA load current) Response time 2 1 s/2 s Output protection Short circuit protection Output mode Flow Select one of the output (hysteresis or window comparator mode), the output for the accumulated flow and the accumulated pulse output. T emp. Select the output for fluid temperature (hysteresis or window comparator mode).

SYJ300-OMU0003

SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700 M3 : 0.8N.m O 21 No.SYJ300-OMU0003 Assy SYJ72(R)(-Q)) (SYJ74(R)(-Q)) SYJ700-10-1A M3 : 0.8N.m :SYJ700-10-2A , (SYJ700-5-3) SYJ700-10-1AAss'y CE SYJ700-10-2A-1-Q SYJ700-10-2A-2Q 22 No.SYJ300-OMU0003 Assy 5 G V111 T S (DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m

Dual Speed Controller with One-touch Fitting Series ASD 1

T Metric Size L4 L5 A1 A2 M Max.

ASD

T Inch L4 L5 A1 A2 M MAX.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

AMR3000 to 6000

Failure to observe this precaution could damage the filter element. 1.10-3 Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Solenoid valve (Port size) Orifice symbol (Diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXK21 VXK22 VXK23 DC 01 (1/8) 02 (1/4) Port symbol (Port size) Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in fullwave rectifier type as a standard. 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (4) Bracket Part No.

VXA31/32

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

Metering Valve with Silencer Series ASN2

CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart.

Compact Cylinder with Solenoid Valve/

50 to 300 mm/s Piston speed 1.

MGC

Rush speed into cushion is as follows: M + m 2 = 1.4a Ek = 2 Ek: Kinetic energy (J) M: Weight for the driven object (kg) m: Weight for movable part of cylinder (kg) : Maximum speed (m/s) a: Average speed (m/s) = 1.4 x 300 = 420 mm/s. Note) Set a so that rush speed into cushion should not exceed 0.75 m/s.

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.