Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

SQ1000/2000

Exhaust outlet 96 Series SQ1000/2000 Optional Manifold Parts for SQ1000 External pilot specification [-R] External pilot port (M5 x 0.8) This can be used when the air pressure is 0.1 to 0.2 MPa lower than the minimum operating pressure of the solenoid valves or used for vacuum specifications.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

KG

(mm) <M5> Note) Weight (g) D1 D2 L1 L2 A M L3 KGV04-M5 KGV04-01 KGV06-M5 KGV06-01 KGV06-02 KGV08-01 KGV08-02 KGV08-03 KGV10-02 KGV10-03 KGV12-03 KGV12-04 M5 x 0.8 2.9 6 14 26.5 18.5 3.8 3.8 14.5 22.5 9.8 20.5 11 15 4 8 10.4 13.4 22 16 2.9 1 8 M5 x 0.8 7 15 26 24 30 47 40 49 63 80 Reference dimensions after R thread installation.

Electric Grippers

Bolt LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M3 x 0.5 M4 x 0.7 0.9 1.4 M3 x 0.5 M5 x 0.8 0.9 3.0 M4 x 0.7 M6 x 1 1.4 5.0 M5 x 0.8 M6 x 1 3.0 5.0 M5 x 0.8 3.0 M6 x 1 5.0 When using the thread on the back of the body When using the thread on the back of the body Max. screw-in depth L [mm] Max. tightening torque [Nm] 10 Max. tightening torque

3 Port Solenoid Valve Metal Seal Series VZ200 1

: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking) 11.5 11.5 With light/surge voltage suppressor

SYJA3000

SYJA3520-M3 2 position single SYJA3140-M5 48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

6.9 through 8 30 1 M10 x 1.5 x 8 L (Hexagon socket set screw) 2 x 11 counterbore depth 6.3 36 Z 1 750.2 750.2 76 44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30

Electric Actuator with Integrated Guide

0.7 8 4 75 C (Thread size) M5 x 0.8 10 4 70 When mounting a coupling on the motor, mount it within the dimensional range shown on the left.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MHKL2-16 MHK2 -20 MHKL2-20 MHK2L-25 MHKL2-25 5 8 1.3 3.3 M5 x 0.8 M4 x 0.7 2.1 10 M5 x 0.8 4.3 M6 x 1 5.9 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D537

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

Bernoulli Gripper

The pressure sensor is shipped together with the product but does not come assembled. 12 ZNC Series Dimensions: 30, 40, 60 Basic type M5 x 0.8 thread depth 4 Air supply port PB1 M5 x 0.8 thread depth 4 Multi-port2, 4, 6 4 x H thread depth J R 16.5 Counterbore diameter P, depth Q Counterbore diameter P, depth Q 6.5 45 45 30 M5 x 0.8 thread depth 4 Air supply port PA1, 4 120 120 A Counterbore

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 7 12.7 9.6 12.3 28.6 25.8 25 22.2 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 17.3 17.3 3.2 22.1 8.4 22.1 9.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 28.6 25.8 25 22.2 21.3 26.1 4 7 9.6 7 16.5 8 11.4 9.3 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 25 22.2 9.6 AS121F-M5

Modular F.R.L. Unit

(PSI, F) -Z Attachments Port size Function M5 x 0.8 1/8, 1/4, 3/8, 1/2, 3/4, 1 Piping adapter Allows installation/removal of the component without removing the piping.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Nil R Internal pilot External pilot M3: M3 x 0.5 (SJ2000 only) M5: M5 x 0.8 (SJ3000 only) Back pressure check valve External pilot spec. is not applicable for 4 position dual 3 port valves. None Built-in Nil K Back pressure check valve is not applicable for 3 position valve.