Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output

Dual Speed Controller with One-touch Fitting Series ASD 1

T Metric Size L4 L5 A1 A2 M Max.

Fieldbus system EtherCAT compatible SI Unit

1 to 65000 (k) 40x4:0 Fault mode UNSIGNED8 Number of Channels 40x4:01 40x4:20 Channel 0 Channel 31 (Output setting value during communication fault) 0=Hold 1=Clear 2=Force ON Enum0804 40x5:0 Idle mode UNSIGNED8 Number of Channels 40x5:01 40x5:20 Channel 0 Channel 31 (Output setting value during communication idling) 0=Hold 1=Clear 2=Force ON Enum0804 40xE:0 System parameters UNSIGNED8

4/5 Port Solenoid Valve

1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting for 1/4" Type 43 (5 port / base mounted) How to Order 10 SS5YJ5 43 05 C4 Clean series Manifold stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 20 stations A, B port C4 Nil F N T Rc G NPT NPTF P port 1/8 A, B port size One-touch fitting for 4 C4 One-touch fitting

5 Port Solenoid Valve Series SY3000/5000/7000/9000

00 P 2 VQ7 Regulated port Regulated port P port A port (P controlled, A port regulated) B port (P controlled, B port regulated) P port P A1 B1 P A1 B1 A port (P controlled, A port regulated) B port (P controlled, B port regulated) Pressure gauge connection port Pressure gauge connection port 05 06 M1 Pressure gauge (G15-10-01) Plug (M-5P) 00 M1 Pressure gauge (G15-10-01) [for odd number

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

O O R D E R NVFS5000 NVFS 5 F 0 P O S I T I O N P O R T S I Z E 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center 6 3 Position Perfect Without Subplate 03T 3/8 NPTF 04T 1/2 NPTF 06T 3/4 NPTF P O R T I N G Side *B Bottom Note) *1/8 NPTF Only B O D Y T Y P E 0 Plug-In Type M A N U A L O P T I O N 0 Standard 1 Std & Direct

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-t 1-' I . '" ~ III 1-. ~. 101 B P A B P A B P -I: e-' ~ .'" III III III _ ...J _ -I: """'. T '"'Iii A B P A eH~ I I--!._';':: 1--2.9~75) 3.98(101) 5.93(150.5) 6.22(158) Dsi Bottom porting NWSFR2-01-( stations )2-( port size) With Indlca10r light 0.85 (2 t.5) and surge vollage SUpOre or '.NPTF 2 ports PilO1 oper8~lor="'E""XH:;-:port=2-G(PF)'.

VFS

Manifold Option Parts Interface regulator: ARBF2000-00-P-1 (Plug-in type) ARBF2000-00-P-2 (Non plug-in type) Individual SUP spacer: VVFS2000-P-01 02-1 (Plug-in type) VVFS2000-P-01 02-2 (Non plug-in type) Individual SUP spacer Interface regulator SUP port Individual EXH spacer: VVFS2000-R-01 02-1 (Plug-in type) VVFS2000-R-01 02-2 (Non plug-in type) Air shutoff valve spacer: VVFS2000-21A-1

PSE540/560

Data PSE561 PSE560 PSE563 PSE564 Model 0 to 101 kPa 0 to 1 MPa 0 to 500 kPa 100 to 100 kPa 500 kPa Rated pressure range 1.5 MPa 750 kPa 500 kPa Proof pressure Model PSE56--28 PSE56Fluid Fluid, including gas, that will not corrode Stainlesss steel 316L Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 10 mA or less Current consumption

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting for 1/4" Type 43 (5 port / base mounted) How to Order 10 SS5YJ5 43 05 C4 Clean series Manifold stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 20 stations A, B port C4 Nil F N T Rc G NPT NPTF P port 1/8 A, B port size One-touch fitting for 4 C4 One-touch fitting

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

Micro Mechanical Valve Series VM1000

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F .O.F .* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

SYJ3000/5000/7000

SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5 Port/Base mounted) How to Order SS5YJ5 43 05 C4 Stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 A, B port C4 20 stations Nil F N T Rc G NPT NPTF P port 1/8 A, B port size

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

ARBY7000 Regulated port Pressure gauge connecting port Regulated port Pressure gauge connecting port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 Pressure gauge (G15-10-01) Plug (M-5P) 05 M1 00 M1 Pressure gauge (G15-10-01

SYJ300/500/700

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For