3 Port Solenoid Valve

Lead wire length: 2000 mm V114-5LOZ-M5 SY100-68-A-20 Lead wire length: 300 mm (Standard) V114-5LPZ-M5 Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms Grommet, L and M Plug Connector With light (Z) Z N R Coil Symbol for a connector assembly with cover Caution No need to indicate the part number for a connector assembly with cover in this case.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

"Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14 3(R) port 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 19 1 3 Manual override 9 23 1(P) port 3(R) port DIN terminal VFN212N-l D (Y)ll-02l-D-l 216 19 23 2(A) port Indicator light (With "Z") Applicable heavy-duty cord O.D. 6 to 8 Pg 9 84.5(Without "Z": 66.5) 36.5 75.5(Without "Z": 57) 24 SMC 32

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

3 Way,3 Port Solenoid Valve NVZ Series

NW3Z5-40-O2 . NW3Z5-4r -Ol . NW3Z5-41-02 . NW3Z5-41R-Ol . NW3Z5-41R-O2 @ Bodg Ported Type inch (mm) Grommet// NVZ5O2-OG NVZS02-OH ; 3 threads ; M type plus connector,/Nvz5Q2-OM L type plug connector/NlazsO2-OL , r F l t , , 0.133.2)Dia 2 lrounting holes i Base lVlounted\1pe with Subphte inch (mm) Grommet,,/NvZsO4-OG, NV25O4R-OG NVZ5o4-OH.NVZSO4R.OH 1G32Nom.

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

E-MY2B_E_A

Perform maintenance for the product periodically. 4 Model Indication Method E-MY2B 16 100 T N M M9B General 3 positions 5 positions General Nominal size Number of auto switches 16 25 Auto switch Speed type L Low speed Cable length M Middle speed M 1m Nil Standard speed L 3m Z 5m Load type Q Heavy load Positioning stop number Nil Standard load Nil 3 positions E Midium load A 5 positions D

AV2000/3000/4000/5000

Soft Start-up Valve AV2000/3000/4000/5000 How to Order AV 00 1 G 20 02 Flow direction Nil R Left to right Right to left Soft start-up valve Manual override Nil: Non-locking push type (Flush) B: Locking type (Tool required) C: Locking type (Lever) Body size 20 30 40 50 1/4 3/8 1/2 3/4,1 Thread type Rc G NPT Nil F N Light/Surge voltage suppressor None Nil S Z With surge voltage suppressor (

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

Style: Pressure Switch w/ T-Spacer, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC20, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: Rc, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa

E-MY2_E_D

positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 10 Names and Functions of Controller (3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

Multi-channel Digital Sensor Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

MTS

0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)

Series VS

D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T

Process Valve Series VNA

6.5 60.5 73 80 90 50 60 35 40 141.5 370 Process Valve: 2 Port Valve For Flow Control Series VNB Port size: 32A, 40A, 50A Standard/Vacuum pilot Applicable cable O.D. 6 to 8 (D, DL) Pg.9 (D, DL) K (Terminal with indicator light: DL) Pilot port 12(P1), 10(P2) L (Conduit terminal: T) Manual override Port size: refer to table below (Non-locking push type) J (DIN terminal: D) I (Conduit: C) H (