MB1

B A+B+90 32, 40 50, 63 80, 100 25 40 30 45 60 55 160 190 175 7 Standard Type Double Acting: Single Rod Series MB1 Accessory Dimensions 30 Rod end nut (standard equipment) Knuckle joint pin Clevis pin Dd9 d 2-d D C L l m H B Bore size (mm) Clevis Knuckle Part No.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

D-F9P, D-F9B D-F9NV, D-F9PV, D-F9BV _ Unit: mm L 3.1 _ _ The auto switch will not protrude in the case of D-F9N, D-F9P, D-F9B. H 2.3 2.3-25

Digital Flow Switch

3000 L/min 6000 L/min 12000 L/min 30 L/min 3000 L/min PF3A703H 3150 L/min 30 L/min 0 L/min 3150 L/min 60 L/min 6000 L/min PF3A706H 6300 L/min 60 L/min 6300 L/min 0 L/min 120 L/min 12000 L/min 12600 L/min 12600 L/min PF3A712H 120 L/min 0 L/min Rated flow range Set point range Display range Analog Output Output Output Flow/Analog Output 0 L/min A*2 B Voltage output (1 to 5 V)*1 1 V 1.04 V

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

(4) L L Cylinder A Cylinder A Auto switch position Auto switch position Dimensions by Mounting Style (1) (2) Cylinder B Cylinder B Bore size (mm) Auto switch model L d L d D-A9, D-A9V 0 15 27 (37) 5 (15) D-M9, D-M9V 0 15 27 (39) 5 (17) d L d L 8 D-F8 0 15 47 25 D-M9W, D-M9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style (1) (2) (3) (4) ( ): Denotes the values of D-A9V, D-M9V and D-M9WV

Support Guide/11-LEFG Series

: Ball Screw Drive 11-LEFG32-S 42 70 (122) 5H9 (+0.030 0 ) depth 5 4 x M6 x 1 thread depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60) 32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180

CS1

D-A5/A6, D-A59W Tie rod mounting D-G3/K3 Band mounting Solid state swich D-F5/J5, D-F5NT, D-F5W/J59W, D-F5BA, D-F5F Tie rod mounting 1.10-1 Air Cylinder/Standard Series CS1 Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 JR Rod boot/Cushion Rod boot Mounting J K N R H Nylon tarpaulin Heat resistant tarpaulin No cushion With cushion on

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ2-Z Series Air Cylinder/10, 16 10-/1121-/22How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.

Air Slide Table Series MXW

Body tapped H Model Bolt Max. tightening torque (Nm) Max. screw-in depth l (mm) Positioning hole D x H (mm) l 5H9 + 0.030 0 depth 4.5 MXW8 2.1 M4 x 0.7 6 D 5H9 + 0.030 0 depth 4.5 MXW12 2.1 M4 x 0.7 6 6H9 + 0.030 0 depth 5.5 MXW16 4.4 M5 x 0.8 9 Model Bolt Max. tightening torque (Nm) Max. screw-in depth l (mm) Positioning hole D x H (mm) 6H9 + 0.030 0 depth 5.5 MXW20 4.4 M5 x 0.8 13 8H9 +

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

-10 MXP10-20 Table displacement mm Table displacement mm Table displacement mm 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Compact Cylinder/Guide Rod Type Series CQM

Auto Switch Mounting Height (mm) D-A7H/A80H D-F7/J79/F7W D-J79W/F79F D-F7BAL/F7NTL Auto switch model D-P4DWL D-J79C D-F7V D-F7WV D-F7BAVL D-A79W D-A73C D-A80C D-A7 D-A80 Hs 31.5 35 41 47.5 57.5 67.5 Hs 32.5 36 42 48.5 58.5 68.5 Hs 38.5 42 48 54.5 64.5 74.5 Hs 34 37.5 43.5 50 60 70 Hs 35 38.5 44.5 51 61 71 Hs 38 41.5 47.5 54 64 74 Hs 44 50 56.5 66.5 76.5 Bore size 32 40 50 63 80 100 D-P4DWL

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MDHR2-20, 30 MDHR2-10, 15 H H L L Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Auto switches of D-M9N, D-M9P and D-M9B are used. Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Max. Protrusion of Auto Switch from Edge of Body: L, H Max.

7

Auto switch mounting bracket part no. 80 100 Applicable auto switch model D-P3DWASC D-P3DWASE D-P3DWAL D-P3DWAZ D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ D-P79WSE D-P74L D-P74Z BK7-080S BAP2-063 BAP1-063 440 Related Products CK1 Series Dimensions CKGA80 Built-in standard magnet type/with magnetic field resistant auto switch (D-P4DWS) 60 60 35 54 + Stroke Speed controller valve Top width across flats

MTS

(15) D-M9, D-M9V 0 15 27 (39) 5 (17) d d 8 Data D-F8 0 15 47 25 L L D-F9W, D-F9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style ( ): Denotes the values of D-A9V, D-M9V and D-F9WV. (1) (2) (3) (4) Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 0 28 28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

It is already built-in to the rectifier circuit. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

VQ7-6/7-8

(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 38(27) L2 L2 L1 B A A B B A SMC A B B A A PA L side L side R side R side 40(53) D side D side (2n-1/8

VQ7-6/7-8

(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA L1 38(27) L2 L2 L1 B A A B B A SMC A B B A A PA L side L side R side R side 40(53) D side D side (2n-1/8) 2 14 82.5 59 17 34 82.5 154 (Single) 175.5 (Double) 62 154 (Single) 175.5 (Double) 94 180.5 175.5 (3 position) 4n-3/8, 1/2 180.5 175.5 (3 position) Bottom ported drawing 183.5

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

ZP

L E D C B J 04 4 06 6 08 8 Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.