MY1 The switch unit should be kept as close as possible to the contact protection box with a lead wire that is no more than 1 meter in length. 12 Reed Switches: Direct Mounting Type D-A90(V), D-A93(V), D-A96(V) Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.
(same side) 65 60 D-Y59/Y69/Y7P/Y7PV 1 or 2 pcs. (different sides) 20 20 2 pcs. (same side) 65 70 Solid state switch D-Y7W/Y7WV 20 25 1 or 2 pcs. (different sides) 75 70 2 pcs. (same side) D-Y7BAL 20 25 1 or 2 pcs.
10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L W 2 J D C 21 B Nil Built-in magnet No Nil Auto switch Number of auto switches D With auto switch (Built-in magnet) Nil S n Without auto switch 2 pcs. 1 pc. n pcs.
2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.
Applicable auto switch model No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 1 pc. 5 2 pcs. 5 5 5 10 10 8-8-9 9 Series MXP Table Deflection Table Displacement due to Pitch Moment Load Amount of displacement on A when load is applied on F . Table Displacement due to Yaw Moment Load Amount of displacement on A when load is applied on F .
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
Equivalent to 5U (EIA standards*1) 1 Refer to page 1 for details on 19-inch racks. 310 mm Fluid fill port Equivalent to 7U (EIA standards*1) Drain port 399 mm DI filter (Option) Equivalent to 9U (EIA standards*1) Particle filter (Standard) Bypass valve (Standard) 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz) Cooling capacity 0.1C Temperature stability Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type
Hs Auto switch Reed switches D-A5, D-A6 D-A59W Approx. Ht Solid state switches D-F5, D-J5 D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5F Approx. Ht A 33 B G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs
model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24
model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
25 2B 14 5 23 8 6 23 8 8 29 12 6.2 4 1.8 12 29 6 23.5 8 8 29.5 1 2 6.2 4.5 2.3 ZPT3~ 32 35 14.5 5 23.5 8 29.5 1 2 Deep type F:M5X O .8 F:M6 x l F:M8 x l .25 F :~ vi D I E 1 G D I E IG D I E 1 G D I E G MOdel ,A ;B Ic ZPT25D 25 28 20 5 129 1 8 6 129 1 8 8 135 1 1 2 6.2 135 1 12 1 0 I 16 Flat type Deep type/ ZPT10D ' 16D Flat type Deep type/ ZPT40D only F F F F Widlh across Width acro5$ flats
15 7.2 7.5 41.5 22 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Piping port URJ 1/4 Front protection cover The thickness of the panel is to 3.2mm. 12 Series ZSE F/ISE 50 60 50 60 Description (Common to ZSE50F/ISE50 and ZSE60F/ISE60) 31/2 digit LED kPa Displays current pressure Displays current mode
size (mm) Symbol Port size Rc 1 2 3 Note) 4 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 1 MPa N.C. 0.5 MPa N.O.
1 1 4.5 4.5 4.5 4.5 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-F9(V) D-F9W(V) MHF2-8D1 Red ON Green ON MHF2-8D 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHF2-12D1 Auto Switch Mounting MHF2-12D2 Insert the auto switch into the switch mounting groove in the air chuck in the direction shown below, and after setting
Switch return position (OFF) D-F9N D-F9B D-F9BA D-F9NW D-F9NV D-F9BV D-F9NWV MHS O MHY2-10D 3 8 13 6 1 1 8 S Hysteresis O MHY2-16D 3 8 13 7 1 1 8 S MHC2 Switch operating position (ON) O Hysteresis MHY2-20D 5 10 4 5 S Switch operating position (ON) MHT2 O Switch return position (OFF) MHY2-25D 3 9 3 3 S MHY2 D-F9NW(V) D-F9BA MHW2 D-F9N(V) D-F9B(V) Red light at ON Red light at ON Green