Vacuum Pad

Stroke (M) Buffer specification Symbol Stroke 20, 25 35, 50 10 10 mm V V 20 20 mm V V J Rotating K Non-rotating Specifications Pad diameter Buffer specification Stroke [mm] Tightening torque [Nm] Mounting Spring reactive force [N] At 0 stroke At full stroke 20, 25 J/K 10, 20 2.5 to 3.5 M10 x 1 1.0 3.0 35, 50 J/K 10, 20 6.5 to 7.5 M14 x 1 2.0 5.0 Precautions Be sure to read this before handling

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

MLGC

EK M : Kinetic energy (J) : Load weight (kg) + Weight of movable part (kg) : Piston speed (m/s) EK= 2 M 2 Allowable Kinetic Energy When Locking 40 1.19 {12.1} 32 0.67 {6.8} 25 0.42 {4.3} 20 0.26 {2.7} Bore size (mm) Piston speed (m/s) J {kgf cm} Stopping Accuracy (Not including tolerance of control system.)

FSQ seies

*j::: ""."," O Note: Shaded areas in bold type-Special Order; Unshaded areas-Made to Order Fixed mountins heisht SefteS RSO Max. operaling pressure Ambient and fluid Lubrication Cushion Stroke lenoth tolerance Bolh Non lube Throuqh holet Both ends tapped Avaitabte Rod end configuration Sound bar, non"rolatjng. roller. levr Bore/standard stroke 10, 15. 20 20, 25, 30 oolble act rg Sngeactng

Air Cylinder RSQ Series Stopper Cylinder

*j::: ""."," O Note: Shaded areas in bold type-Special Order; Unshaded areas-Made to Order Fixed mountins heisht SefteS RSO Max. operaling pressure Ambient and fluid Lubrication Cushion Stroke lenoth tolerance Bolh Non lube Throuqh holet Both ends tapped Avaitabte Rod end configuration Sound bar, non"rolatjng. roller. levr Bore/standard stroke 10, 15. 20 20, 25, 30 oolble act rg Sngeactng

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Q) 2-P one-touch fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

STAINLESS STEEL CYLINDER

Please refer to "Fig.1 Allowable lateral load applied to rod end ". ( Page 10) Table 2 Allowable kinetic energy CG5 N A Formula E= ( m/ 2 )v2 Bore size( mm ) E max ( J ) E max ( J ) 20 0.28 0.42 E Kinetic energy ( J ) m : Load mass ( Kg ) v Max. piston speed ( m/s ) 25 0.41 0.65 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max ( J ) Should be satisfied. 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 Warning

Mist Separator Series AFM20/30/40

Mist Separator Series AFM20/30/40 How to Order F 30 AFM Option 03 BD 2R Description Applicable model Symbol Mist separator 2 Accessory Metal bowl AFM20 to 40 Body size 6 Applicable model Description Symbol Nylon bowl AFM20 to 40 Port size 20 30 40 8 Nil Metal bowl with level gauge AFM30/40 (3) C Body size With bracket B AFM20 to 40 With bowl guard Port size AFM20 Thread type Symbol 20 30

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Series VS

This unit is available as either a P port regulator or as an A or B port regulator.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

Compact Cylinder

A I-G04 I-G05 Y-G04 Y-G05 M14 x 1.5 42 56 14 18 22 28 30 40 12 16 14 20 42 56 16 20 22 28 M14 x 1.5 12 16 14 20 36 41.6 10 +0.058 0 18 IY-G04 IY-G05 30 40 +0.5 +0.3 M18 x 1.5 M18 x 1.5 44 50.6 14 +0.070 0 22 +0.5 +0.3 Knuckle pin and retaining ring are included.

High Vacuum L Type Valve

Description XLS-16XLS-16-P XLS-25XLS-25-P (2) Coil assembly XLS16-20-*G,C,D,T XLS16-20-P*G XLS25-20-*G,C,D,T XLS25-20-P*G (6) Core assembly XLS16-30-1 XLS25-30-1 (4) Armature assembly XLS16-30-2 XLS25-30-2 (3-1) Core O-ring AS568-018V AS568-018V (3-2) Bonnet O-ring AS568-025V AS568-030V Note) Enter voltage no. at * G, C, D, and T after * mean the symbol showing an electrical entry. 6 XL

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Basic, Foot, Rod flange, Head flange, Clevis (Used for changing the port location by 90) Mounting Male rod end Female rod end 0.2 J 0.29 J 0.46 J 0.84 J 1.4 J 2.38 J 4.13 J 6.93 J Symbol Specification Allowable kinetic energy 0.11 J 0.18 J 0.29 J 0.52 J 0.91 J 1.54 J 2.71 J 4.54 J -XA Change of rod end shape Operate the cylinder within the allowable kinetic energy.