High Vacuum Angle Valve, XL Series Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 091 130 182 Note) A set of side supports consists of a left support and a right support.
I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
30o MM W W AL T T A A A MM L H H H 25 Series CA2 Simple Specials These changes are dealt with Simple Specials System.
A B 45 R38 R38 37 102 0.05 122.7 152 0.05 R28 M8 x 1.25 R28 R7 1 1 22 8.5 R7 22 20 12.5 A B Part no.
1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!
9 Cushion seal A Steel ball A Urethane Carbon steel %6 @0 Steel ball B Same as cushion seal A Carbon steel @1 Cushion seal B Urethane %7 except 20, 25 standard stroke Tooth ring Stainless steel @2 Cushion ring gasket A Bumper NBR Urethane %8 @3 C type retaining ring for taper ring Carbon steel @4 Same as cushion ring gasket A except 20, 25 standard stroke Cushion ring gasket B NBR %9 C type
Q = T x L x x C 860 Q = T x L x x C 60 x 1000 6.0 x 1.2 x 1.80 x 103 x 0.23 860 = 6.0 x 20 x 1.80 x 103 x 0.96 x 103 = = 3.5 kW 60 x 1000 Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW = 3456 W = 3.5 kW Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW Circulating equipment T2: Return temperature Customers equipment L T = T2 T1 T1: Outlet
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
Fixed end KG KFG2 MS KKA Maximum Operating Pressure How to Order KP Metric size TD0425 10 2.0 LQ 1.8 Max. operating pressure MPa TD0425 Length per roll 1.6 MQR Length 10 m roll 20 m roll Symbol 10 20 TD0604 1.4 T T 1.2 TD0806/TD1075/TD1209 1.0 IDK Tubing model 0.8 0.6 0.4 0.2 0.0 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Operating temperature C 509 Soft Fluoropolymer Tubing
2 Zinc chromated Cushion ring A Release piston Carbon steel Brass -X 20 Oil-impregnated sintered alloy Release piston bushing Same as cushion ring A $9 !3 Cushion ring B Brass except 20, 25 standard stroke 25,32,40 Steel + Special resin 20%0 !4 Zinc chromated long strokes not available Seal retainer Unlocking cam Electroless nickel plated Rolled steel Chromium molybdenum steel %1 !
Adapter ZP3P-T (20 to 50) PTSF-(A5/AG1/A12/AG2/AG3) ZP3P-T (20 to 50) PTSF-(B5/B8) w T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T
I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
Inch Bottom bracket Single sided connections IRV 20 A C08 Made to Order For details, refer to page 10.
For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1
stop (e.g. a large load is mounted on a carrier). 7 11 7.
S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.
S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.
(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"