Soft Start-up Valve

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Compact manifold regulator ARM5 Series

. 4.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

LEF-OM002xx

B C B B-B C-C D-D Roller type seal band stpper Parts list Description Material Note Description Material Note 14 Belt 1 Body Aluminum alloy Anodized 15 Cover plate Aluminum alloy Anodized 2 Rail guide 16 Table spacer Aluminum alloy LEFS32 only 3 Ball screw 17 Motor 4 Ball screw nut 5 Table Aluminum alloy Anodized 18 Motor cover Synthetic resin 6 Blanking plate Aluminum alloy Anodized 19

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

VQ5000

metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 C [dm3/(sbar)] 12 12 VQD 4/2 5/3 (A/B EA/EB) 0.14 b 0.14 0.14 2.9 Cv 2.9 2.9 12 C [dm3/(sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

LX Series Compact Electric Actuators

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C3 C4 C6 M5 Function With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 threads 0 1 Metal seal Rubber seal C Note) Inch sizes use the following symbols.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

ZR

M2.5 x 0.45 x 82 4 For nozzle size 18, 20 M2.5 x 0.45 x 86 4 6 6 6 6 2 2 2 2 4 4 4 4 For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle

VER2000/4000

4 !5 !6 q w e r t y u i Block packing !

Round Type Hydraulic Cylinder

3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

F through, counterbore G Bottom 4-H M N C D HR HN (MAX.) 4-O Bracket (Refer to the table below.)