Air Slide Table

[mm] Rubber Stopper Model A B C D E F MXQ6(A) 41.5 27 17 25 15 10 MXQ8(A, C) MXQ6B 41.5 27 16 25 14 10 MXQ12(A, C) MXQ8B 46.5 28 17 27 16 11 MXQ16(A) MXQ12B 51.5 30 16 28 15 13 MXQ20(A) MXQ16B 58.5 32 19 31 18 13 MXQ25(A) MXQ20B 65.5 34 15 33 15 18 Cap bracket Stroke A RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to

CV/MVGQ

-15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1

CV/MVGQ

10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 2 Series CV Valve Mounted Cylinder

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Electric Actuator/Slider Type

5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

SY

83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Terminal block (M3) 9 pins Terminal block

Fluoropolymer Piping Equipment

B C E H L M Min. port size M LVC LQ1E11 4 2 4 10 18.5 11.5 2.6 LQ1E12 3 1.8 LQ1E21 6 4 6 15 14 28 16.5 3.6 LQ1E22 4 2.6 LQ1E2C 3 1.8 LQ1E31 10 5 9 20 17 36.5 23 7.4 LQ1E32 8 5.5 LQ1E33 6 3.6 LQ1E41 12 6 9 24 21 43 28 9.4 LQ1E42 10 7.4 LQ1E51 19 7 14 29 26 54 39 15 LQ1E52 12 9.4 LQ1E61 25 8 18 39.5 36 69.5 49 21.2 LQ1E62 19 15 1/8 LVA Class 1 LVH LVD B L (E) C LVQ M SMC LVP 1/4 C H (E) LVW

Table of Contents

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

1

(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

CRB2/CRBU2/CRB1

20 30 40 8 14 9 18 10 20 13 22 15 30 C D Notes) Only side ports are available except for basic type.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

ZP

P.49 Features 2 : Series ZP3 (: Series ZP2 C: Series ZP Vacuum Pads Series ZP3/ZP2/ZP Pad Diameter List New New Pad type Symbol 0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15 Note) C ( C U C C C C ( Note) Note) Note) Note) Note) Note) Note) Note) MU ( ( ( ( ( ( ( ( Flat Note) Note) Note) EU ( ( ( ( ( Note) AU ( ( ( ( ( Flat with rib C C C ( ( ( Flat with groove UM Thin flat UT C C ( (

Table of Contents

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

CJ2

Bore size (mm) 6 10 16 Z LC A B C GB D LH H F LB LT LX LY LZ GA S T X MM NA NB NN Y 77 4.5 15 12 14 3 28 9 8 1.6 15 24 16.5 32 14.5 M6 x 1.0 49 3 5 M3 x 0.5 16 7 7 74 4.5 15 12 14 5 4 9 28 8 1.6 15 24 16.5 32 8 M8 x 1.0 46 5 M4 x 0.7 12.5 9.5 7 75 5.5 15 18.3 20 5 5 14 28 8 23 2.3 33 25 42 8 M10 x 1.0 47 6 M5 x 0.8 12.5 9.5 9 With Air Cushion/Dimensions other than the table below are the

LJ1H

B C D A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

CJ2

A WA FC B WB FT C WW FX D S FY F Z FZ FB GA GB H MM NA NB NN 14.5 15 14.5 4.5 15 13.5 1.6 17 4.5 24 4 63 14 8 91 32 7.5 6.5 28 M4 X 0.7 21 18 M8 X 1.0 19 M10 X 1.0 15 14.5 5.5 18 13.5 2.3 20 5.5 33 5 64 20 8 92 42 7.5 6.5 28 M5 X 0.8 21 18 Double Clevis (D) CJ2ZD Bore size Stroke Material: Iron d C B H Part No.