Fieldbus System

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

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Pipe thread type Name plate in imperial units Pressure gauge in imperial units Sales Note 6) G EA, EB, EC, ED Nil Rc MPa MPa Fixed SI unit Japan, Overseas NPT G Rc Only overseas NPT psi psi With unit conversion function (Initial value psi) G Z Note 4) Note 4) For pipe thread type: NPT Note 5) For options: EA, EB, EC, ED Note 6) According to the new Measurement Law, only the SI unit type is

90

Pipe thread type Name plate in imperial units Pressure gauge in imperial units Sales Note 6) G EA, EB, EC, ED Nil Rc MPa MPa Fixed SI unit Japan, Overseas NPT G Rc Only overseas NPT psi psi With unit conversion function (Initial value psi) G Z Note 4) Note 4) For pipe thread type: NPT Note 5) For options: EA, EB, EC, ED Note 6) According to the new Measurement Law, only the SI unit type is

3-Position Rotary Table

Each operational contents Figure 3 Pressure port and active speed controller Table 1 Operating Pressure port Speed controller A, C B, D C port B port D port A port Clockwise-1 C Clockwise-2 1 l o ec Co s k Counterclockwise-1 w wi is 2 k un ec eo 2 Counterclockwise-2 l C te is rc kw lo oc ck cl wi er se nt -1 u o C 294 3-Position Rotary Table MSZ Series Angle Adjustment 1) Stop positions

Compact Rotary Actuator Series CRQ2

EA) EC ED ND EF 2 x K Hexagon socket head set screw NA 0.5 GC GD NB NC DNote) This component does not exist for 180 type.

Possible to transfer a workpiece at low-speed.

EE) GA ND GB EC ED EF 2 x K Hexagon socket head set screw GD GC 0.5 NA NC NB Note) This component does not exist for 180 type.

Regulator

EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Nil Nil Nil Nil Name plate and pressure gauge in imperial unit : MPa e Pressure unit Note2) Z Z Z Z Name plate

Regulator

EC EC EC NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z Z Z Name plate and pressure gauge in imperial unit : psi ZA ZA

1

) Since it is normal, the number count is reset EC = 0.

Regulator

EC EC EC NPN open collector 1 output + Analog voltage output ED ED ED ED NPN open collector 1 output + Analog current output + Flow direction : Left to right c Flow direction Nil Nil Nil Nil R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z Z Z Name plate

Air Management Hub, AIR MANAGEMENT SYSTEM, Q22, 300.00000 lb

Air Management Hub, AIR MANAGEMENT SYSTEM, Q22, 770.00000 lb

Digital Pressure Switch

oC (No condensation or freezing) Environ mental Withstand voltage 1000 VAC, 50/60 Hz, 1 minute, Between the external terminal and the case Insulation resistance 2 M (at 500 VDC) Between the external terminal and the case Temperature characteristic 3F.S.

Transfer

FH EY h 3.5 4.5 4.5 EA 10 12 15 EB 20 25 31 EC 6.5 8.5 9.5 ED 60 74 94 EY 53.5 67 81.5 FA 46.7 67.3 67.3 FB 33 43 43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

TS/TISA

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

H/DL/L/LL

Such vessels require EC type examination and then CE marking. 15-18-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

E-P HYREG ® Series VY1

Such vessels require EC type examination and then CE marking. 14-21-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.

Miniature Regulator Series ARJ210

Such vessels require EC type examination and then CE marking. 14-21-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.