CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 22 27 27 32 41 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 8 11 11 13 16 59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CM2

25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

MTS

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180

Copper-free Actuators

, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20

RQ

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

Table of Contents

20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

C95

288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120 1) +0.03/+0.1

Fluoropolymer Tubing Variations

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

VFS

Cable VCTF 24 cores x 0.75 mm2 Plug: ML standard D type connector 25 terminals Cable: 25 core wire, 0.3 mm2 VVFS2000-30A-5 10 m VVZS3000-21A-5 10 m made by Tyco Electronics AMP K.K. VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

2–4

2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25