Bearing Style: Basic Style, Size: 30 mm, Shock Absorber: For Low Energy, Port Location: Standard 180°, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Thread Type: -

Model: MSQ, Type: High Precision Type, Size: 7, Port Location: Side Port, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Model: MSQ, Precision: Basic, Size: 70, Suffix: Adjuster Bolt, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Thread Type: -

Model: MSQ, Precision: Basic, Size: 200, Suffix: Shock Absorbers, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Thread Type: -

Model: MSQ, Precision: Basic, Size: 100, Suffix: Shock Absorbers, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Thread Type: -

Possible to transfer a workpiece at low-speed.

Rotation starting point End of rotation e R g ot n at ra L io n B Rotation starting point End of rotation n io ra at n ot g R e L L B B A Rotation starting point End of rotation A A R e ot g at n ra io n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 The figure shows the view from the long shaft end.

REA/REB

to load's center of gravity (cm) CV 40 20 80.7 8 + Lo 10 15 5 + Lo 15 45.5 6.5 + Lo Bore size (mm) MVGQ Allowable load weight WA (kg) CC 6.

Table of Contents

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

REA/REB

cannot be installed in Area C in the case of 15.

Table of Contents

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

smcmaintenancepartslist

Qty. 1 MY3B16 MY3B25 MY3B40 MY3B63 9 Seal belt MY3B16-16AStroke MY3B25-16AStroke MY3B40-16AStroke MY3B63-16AStroke Polyamide 10 Dust seal band MY3B16-16BStroke MY3B25-16BStroke MY3B40-16BStroke MY3B63-16BStroke 1 Stainless steel 15 Tube gasket RMB-16 RMB-25 RMB-40 RMB-63 2 NBR 16 Piston seal RMY-16 RMY-25 RMY-40 RMY-63 2 NBR 18 Scraper MYA16-15-R6656 MYA25-15-R6657 MYA40-15-R6658 MYA63-15

1

Refer to page 8-15-24.

CRQ2

, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

ZP

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

Free Mount Cylinder

4.5 9.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 10 16.5 16.5 12.5 16 20 20 16 20 24 24 20 25 26.5 26.5 22.5 23.5 32 27.5 27.5 Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Table of Contents

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) L2 Y Size (mm) 10 X L1 3 to 8 5 ( 8 Y) to (Y 1) Size 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 ( 9 Y) to (Y 1.5) Y = L1 = 15 20 5.5 to 18 10 (18 X) to (X 1.5) 3 to 10 7 (10 Y) to (Y 1.5) L2 = 20 30 7 to 20 10 (20 X) to (X 1.5) 5 to 13 8 ( 13 Y) to ( Y 2) X = 30 40 7 to 22 10 (22 X) to (X 1.5) 7 to 15 9 (15 Y) to (Y 4.5) Symbol: A11 The long shaft can be further

ZP

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

ISO Cylinder

(n 2) (n = 4, 6) D-M9l D-A9l*2 10 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W*2 10 15 10 + 15 (n 2) (n = 4, 6) Rail mounting D-F7lW D-J79W D-F7BA 10 15 15 + 20 (n 2) (n = 4, 6) D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) D-F7lW D-J79W D-F7BA 10 15 15 + 20 (n 2) (n = 4, 6) D-M9lW 15 15 15 + 15 (n 2) (n = 4, 6) D-M9lA 15 20 20 + 15 (n 2) (n = 4, 6) *1 Auto switch