Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

PFxx-OMU0002

switch mode [ P] Normal output [ 1500] 1500 L/min (PF3A703H) [ P] Select input switch operation [ 3000] 3000 L/min (PF3A706H) [ 6000] 6000 L/min (PF3A712H) [F 1] Page 31 [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) [ 600] 600 L/min (PF3A712H) [ CoL] Select display colour [ SoG] Green when ON Red when OFF [F 3] [ FiL] Response time [ 1.0] 1 second Page

Aluminum High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Bag Filter

F-91S F-87S FGFC5-60 FGFL3-40 Carbon steel F-88S FGFR5-60 FGFC5-60 150(6B) F-92S F-88S 280 240 166.6 23 22 FGFS5-60 FGFR5-60 Stainless steel F-89S AL-80S AI-18S FGFL5-60 FGFS5-60 F-93S F-89S FGFL5-60 Note) 2 pieces are required per filter unit. JIS10KFF is used for this flange. Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.)

Speed Controller with One-touch Fitting

Sealant/Gasket seal P.554 P.667 P.554 P.554 M/UNF/R/NPT More space beneath the tube. Easier installation/removal of the tube.

1.1

P. 195 DeviceNet P. 199 DI filter P. 195 E Electrical conductivity P. 196 Electromagnetic contactor P. 198 Electromagnetic switch P. 198 EMO circuit P. 198 Ethylene glycol aqueous solution P. 196 eti mark P. 199 ETL mark P. 199 Evaporator P. 192 Expansion valve P. 192 External sensor P. 197 F Facility water P. 193 Flow sensor/Flow switch P. 195 Fluorinated fluids P. 196 Fluorinert P. 196

NVEPA|VEFseies

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

REC

90 0.5 W W W 0.5 F 117 108 95 76 0.7 C J G5-S 0.1 0 500 1000 1500 81 75 66 51 0.3 CV G 60 55 49 37 0.5 Cylinder stroke (mm) The above curve in the graph refers to P = 0.5 MPa of supply pressure.

PSxx-OMM0006CN

31No.PS-OMM0006CN-E 24 [P_2] [n_2] "P""n" [P_2] [P2L][P2H] [F 2] OUT2 1 2 2 3Err[F 2]Er23Err 4OUT2OFFOFF -32No.PS-OMM0006CN-E [F 3] <> [F 3] [F 3] -33No.PS-OMM0006CN-E [F 4] <> [F 4] [F 4] -34No.PS-OMM0006CN-E OUT1 AP1 (OUT1AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2AP2 1) OUT2 OUT2OUT1OUT2 A2LA2H (A2L 1) P_2H_2 (n_2H_2) OUT1 P_1=A-(

LJ1H

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Series VS

ISO SIZE 1 ISO 1 2 ISO 2 3 ISO 3 PORT THREAD NIL Rc(PT) NUMBER OF STATIONS T NPTF F G(PF) 2 2 STATIONS : : : : 10 10 STATIONS P, EXH. PORT LOCATION D DOWN STREAM U UP STREAM B BOTH P, EXH.

2-Color Display

P Rated pressure range: 0.100 to 1.000 MPa 1 MPa 0 0.1 MPa (100 kPa) 2 added outputs P NPN or PNP open collector 2 outputs P NPN or PNP open collector 1 output + Analog output (1 to 5 V or 4 to 20 mA) CAT.ES100-70B Series ZSE30A(F)/ISE30A Mounting Replaceable One-touch fittings Bracket configuration allows mounting in four orientations. The clip type allows easy removal of fittings.

E-P HYREG ® Series VY1

Sensitivity 0.5% F.S. 1% F .S. 1.5% F .S. 2% F .S. Repeatability 0.5% F.S. 1% F.S. 1% F.S. 2% F.S.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

ISO Standard Hydraulic Cylinder

FT Air release Rod side air release G CHS CHS Air release A SS NA NB B C Rod side cushion valve FZ FX S + Stroke ZZ + Stroke H M CH2 CHA Stroke range Bore size (mm) Related Products B C F A D FZ MM FX G GA MA BB E FD FT FY GB J K M H NB P PJ NA 40 25 to 800 52 52 6.6 70 86 57 M6 x 1 7.5 M16 x 1.5 36 29 40 12 22 22 19 23 19 34 10 40 16 8 3/8 58 D50 25 to 800 65 65 9 86 105 69 M8 x 1 9 M20

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

60

VXK21 VXK22 VXK23 Model Solenoid Coil P P P 2 mm P P P P P P P P Coil: Class B, Class H Orifice size Orifice size 3 mm 4.5 mm Rated Voltage 6 mm AC: 100 V, 200 V, 110 V, 220 V, 240 V 230 V, 48 V DC: 24 V, 12 V 8 mm Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 Normally Open (N.O.)

Refrigerated Air Dryer

IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110)

A_HEC-OM-I009

U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f On : Output Off : Not output (Alarm for high and low temperature limit is not detected until the temperature reaches the target temperature after the power is supplied.)

Electro-Pneumatic Valve NVEP/NVEF Series

P O Flow Characteristics/Operating Principles P O, O Construction Detail .. PO Dimensions P O Installation PO Power Amp.: Series VEA Model / Spe c i f i c a t i o n s . . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .