Mini Free Mount Cylinder

3 w e q !1 r y o e t !2 4 Built-in magnet Without magnet Single Acting, Spring Return u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male threaded Replacement Parts: Seal Kit Double Acting Component Parts Contents No. Description Note Material Kit no.

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

AW

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

SL5200

Ports 2 ports 3 ports 4 ports Code w q w q 2PW 3PW 4PW 2) Refer to gauge guide (P.94) for gauge specifications. 2PW 3PW Sample Order Number Port r e SL5502S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications SL5502mmA SL5502 SL5510 SL5506 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 30

Series VQ Metal Seal/Rubber Seal Body Ported

Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Water-cooledThermo-chiller

(75 mm) or less Plate Facility water inlet Rc3/4 (with plug) Circulating fluid outlet Rc3/4 (with plug) REMOTE START/STOP RUN Handle ALARM RESET SEL ENT Circulating fluid fill port Circulating fluid return port for DI filter Note) E S O L C SMC N E P O Circulating fluid level gauge Rc1/4 (with plug) Circulating fluid return port Rc3/4 (with plug) C Ventilation (expiration) Tank drain port

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

SFOD-OMT0010

Parameter is not registered (0-901) E < Details > An alarm is generated when the step data is executed without step data setting. Download the step data to the controller. Turn off the main control and motor control power supplies. Step data is not regestered (0-902) E < Details > System error occurred.

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

Series AK1000

Refer to gauge guide (P.94,95). 2P 3P t r t Sample Order Number Port t AK1510S e q 4 4 4 4 w 4 4 4 4 r w w q q 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 e e 4PL 5PC qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications AK1502 1 to 30 psig (0.007 to 0.2 MPa) AK1515 5 to 150 psig (0.034 to 1.0 MPa) Select compatible materials of construction for the gas AK1506

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

-- NCM seies

a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

3 Position Cylinder Series RZQ

mm or longer. 2 auto switches can be mounted on the same surface when the full stroke is less than 75 mm.

Turntable Cylinder Series MGT

M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !