End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

Plug-in/Plug Lead: Single Unit

with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4

PA3000/5000/PAX1000

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

Table of Contents

How to Order . 64 64 67 68 69 70 70 70 71 71 72 73 75 76 76 76 77 79 80 81 82 83 83 83 84 85 85 86 87 87 87 88 89 90 91 91 91 92 93 94 95 95 96 99 99 100 101 102 103 105 105 105 106 106 107 107 107 108 108 108 109 109 109 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZH ZR1-W10L ZR1-W13L ZR1-W15L ZR1-W18L ZR1-W20L 1.0 1.3 1.5 1.8 2.0 42 52 74 88 105 46 78 95 150 185 0.133 0.133 0.135 0.155 0.154 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

VQ5000

with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical entry) 12 21 47.5 47.5 R2 R1 36 PE 21 4.4 4.4 12 2-Rc1/8 (pilot EXH port) 29.5 29.5 29.5 29.5 2-Rc1/8 (pilot EXH port) 83 L n Dimensions Formulas: L1 = 41n + 76,

MGP

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 MGZ 1000 (1001 to 1400) 204 (215) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235

1.1

d 330 e 480 f 640 g 265.5 h 315.5 i 480 j Model HRG001-A HRG001-W HRG002-A HRG002-W HRG005-A HRG005-W HRG010-A HRG010-W HRG015-A HRG015-W 61 61 94.5 334 105 330 480 640 265.5 315.5 480 61 94.5 105 330 480 640 265.5 315.5 480 61 94.5 334 105 330 480 640 265.5 315.5 480 153 298 398.5 451.5 135 625 741 153 298 398.5 451.5 135 325 625 741 242 342 402 452 115 230 400 560 242 342 402 452 115

0.4

0.15 2.0 15 or less 20 or less Double VQ2201 26 or less Rubber seal 0.80 0.30 3.2 0.55 0.28 2.2 20 or less 26 or less VQ2300 38 or less Metal seal 0.46 0.18 2.0 0.46 0.15 2.0 29 or less 58 or less Closed center VQ2301 44 or less Rubber seal 0.60 0.31 2.2 0.49 0.28 2.0 34 or less 64 or less VQ2000 VQ2400 38 or less Metal seal 0.60 0.15 2.6 0.46 0.15 2.0 29 or less 58 or less Exhaust center 105

2-Color Display

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range For vacuum pressure ZSE30A 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE30AF 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 2 These safety instructions are intended to prevent hazardous situations and/or equipment

Fieldbus System

[Communication connector D-sub] BUS OUT BUS 1 P 1 P 82.3 BUS IN E 3/5 E 3/5 2 2 B 2 B 2 PWR PWR 4 4 A 4 A 4 Note) These figures show the SS5Y3-10SQA-05D-C6. n: stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 103.7 L1 114.2 124.7 135.2 145.7 156.2 166.7 177.2 187.7 198.2 208.7 219.2 229.7 240.2 250.7 261.2 271.7 282.2 292.7 303.2 313.7 324.2 334.7 L2 63 73.5 84 94.5 105

■Specifications ■How to Order

Center A Right Model Arm opening angl CKZT25-105-DCL781EL 105 B CKZT25-90-DCN7018N CKZT25-45-DCN7017N 90 45 30 CKZT25-30-DCN577NN Left C

Power Clamp Cylinder T Z K C -X2797 -X2798 ø 25, ø 32 Compact Type

Power Clamp Cylinder T Z K C -X2797 -X2798 Compact Type 25, 32 How to Order CKZT X2797 S 25 105 Base type X2798 CKZT S 25 105 L With manually operated handle Bore size Manually operated handle mounting position L (Left side mounting) R (Right side mounting) 25 25 mm 32 32 mm Arm opening angle 90 90 105 105 Please contact SMC for other opening angles.

FH99

Suction Filter with Case FH99 Series How to Order 04 0 0 0 M 074 FH99 0 Companion flange Suction filter with cace Nil None With companion flange F Construction/Connection 0 1 Common with L-type threaded and flange L-type flange Nominal filtration 074 105 149 74 m 105 m 149 m Port size (Outlet side) 1/2B 04 06 08 10 12 16 20 24 28 32 3/4B M Micromesh Element Differential pressure indication

Air Cylinder Series CM2

105 201 to 300 126 130 130 301 to 400 151 155 155 401 to 500 176 180 180 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 Bore size 20 25 32 40 23.5 23.5 23.5 27 10.5 10.5 10.5 10.5 109.5 134.5 159.5 184.5 DBoss-cut Style With Air Cushion Built-in One-touch Fittings (mm) (mm) (mm) ZZ Q 21.5 24.5 27 32.5

Electric Slide Tables

Selection example) Based on the graph shown on the right side, Required force: 105 [N] Therefore, the LES25K is temporarily selected. This set value of pushing force is 40 [%].

Plug-in/Plug Lead: Single Unit

with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4

Vacuum Ejector Series ZM

When ventilative or leaky work must be adsorbed, please note that vacuum pressure will not be high. 0 0 0 0 25 20 15 5 10 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM10M Exhaust Characteristics Flow Characteristics 90 90 135 80 80 120 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 105