Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

Micro Mechanical Valve Series VM1000

VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

High Vacuum Angle Valve

of Greene, Tweed Technologies, Inc. 11 Aluminum High Vacuum Angle Valve XLF/XLFV Series Specifications Model XLF(V)-16-2 XLF(V)-25-2 XLF(V)-40-2 XLF(V)-50-2 XLF(V)-63-2 XLF(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLF 5 to 60 (High-temperature type: 5 to 150) XLFV 5 to 50 Operating pressure [Pa(abs)] 1 x 105

ZP

Model 10 13 16 J K: 4 K: 6 G H G H Model ZPRB 6-0-A8 G H G H G H L M L M 79.5 15 53.5 ZPRB10-0-A8 ZPRB10-0-A10 110.5 56.5 63.5 65 99 23 61 97.5 95 43 10.4 20.6 12.8 21.6 ZPRB15-0-A8 ZPRB20-0-A10 115.5 61.5 133 135.5 137 73.5 75 71 51 ZPRB25-0-A8 ZPRB30-0-A10 125.5 71.5 10.4 20.6 12.8 21.6 143 145.5 147 83.5 85 81 ZPRB40-0-A10 179 181.5 183 93.5 95 91 77 193 ZPRB50-0-A10 101 189 103.5 191.5 105

MY1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35

The CK1 series is a clamp cylinder available in two styles of clevis widths *. It is a non-lube, compact, lightweight cylinder with a built-in speed controller. Gaiters are unnecessary because a heavy-duty coil scraper is provided as a countermeasure against spatters. The CK1 is available in 3 bore sizes with stroke lengths up to 150mm. Options include rod attachments and auto-switch capabilities.Two

Sensor Monitor

. -67No.PS-OMU0012-C Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564

Digital Flow Switch (Remote type monitor unit)

PFM510 PFM525 PFM550 PFM511 Set flow range -10.5 to 10.5 L/min -26.3 to 26.3 L/min -52.5 to 52.5 L/min -105 to 105 L/min -34No.PF-OMJ0018-F [F 8] Display resolution This function is only available for the 10 and 100 L/min types. The minimum setting unit can be changed by selecting the display resolution.

JXCx-OMX0009

Controller and Peripheral Devices/Specific Product Precautions . 105 20.1 Design and Selection . 105 20.2 Handling Precautions . 105 20.3 Mounting . 106 20.4 Wiring . 107 20.5 Power supply . 107 20.6 Grounding . 107 20.7 Maintenance . 108 20.8. Specific Precautions for Battery-Less Absolute Encoder . 108 21. Troubleshooting . 111 22. Memory map list . 117 23.

JXCx-OMT0023

CHARACTERISTICS 101 to 107 10.1 Overload protection characteristics 102 10.2 Power supply capacity and generated loss 103 10.3 Dynamic brake characteristics 105 10.3.1 Dynamic brake operation 105 10.3.2 The dynamic brake at the load inertia moment 106 10.4 Cable flexing life 107 10.5 Inrush currents at power-on of main circuit and control circuit 107 11.

Multi-channel Digital Sensor Monitor

, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564, PSE574 0 to 500 kPa -50 to 525 kPa 1 kPa PSE530, PSE540, PSE560, PSE570 0 to 1 MPa -0.105 to 1.05 MPa 0.001 MPa PSE575 0 to 2 MPa -0.105 to 2.1 MPa 0.001 MPa PSE576 0 to 5 MPa -0.1 to 5.25 MPa 0.01 MPa PSE577 0 to 10 MPa -0.1 to 10.5 MPa 0.01 MPa -80No.PS-OMW0005-C Dimensions Power supply/output

AC Servo Motor Driver (Pulse input type/Positioning type ）

lock cable b: Standard encoder cable Standard motor power cable Standard electromagnetic brake cable SSCNET III cable using inside panel standard cord SSCNET III cable using outside panel standard cable 1 105 5 104 1 104 5 103 b 1 103 4 7 10 20 40 70 100 200 Bend radius [mm] 10.5 Inrush currents at power-on of main circuit and control circuit POINT For a driver of LECSB2-T8 or less,

POWER CLAMP CYLINDER

Bore Arm angle( (mm) 75 90 105 120 15 30 45 60 135 0 0 0 0 0 0 0 0 0 50 15 30 45 60 75 90 105 120 135 -4 -5 -5 -5 -5 -5 -5 -6 -9 0 0 0 0 0 0 0 0 0 63 15 45 30 60 75 90 105 120 135 -3 -4 -5 -5 -5 -5 -5 -6 -9 (7) Do not disassemble the power clamp cylinder. The power clamp cylinder consists of a completely sealed structure in order to protect it from welding spatter.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

SV

L Dimension n: Stations L n 2 135.5 125 102.6 16.5 63 3 148 137.5 113.1 17.5 73.5 4 148 137.5 123.6 12 84 5 160.5 150 134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17

Plug-in/Plug Lead: Single Unit

with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4

PA3000/5000/PAX1000

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

Table of Contents

How to Order . 64 64 67 68 69 70 70 70 71 71 72 73 75 76 76 76 77 79 80 81 82 83 83 83 84 85 85 86 87 87 87 88 89 90 91 91 91 92 93 94 95 95 96 99 99 100 101 102 103 105 105 105 106 106 107 107 107 108 108 108 109 109 109 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZH ZR1-W10L ZR1-W13L ZR1-W15L ZR1-W18L ZR1-W20L 1.0 1.3 1.5 1.8 2.0 42 52 74 88 105 46 78 95 150 185 0.133 0.133 0.135 0.155 0.154 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

VQ5000

with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical entry) 12 21 47.5 47.5 R2 R1 36 PE 21 4.4 4.4 12 2-Rc1/8 (pilot EXH port) 29.5 29.5 29.5 29.5 2-Rc1/8 (pilot EXH port) 83 L n Dimensions Formulas: L1 = 41n + 76,