SMC Wireless System EtherNet/IP ® compatible

#E (16 points) 0 2 Digital output unit DY EX600-DY#F (16 points) 0 2 EX600-DM#E (8/8 points) 1 1 Digital I/O unit DM EX600-DM#F (8/8 points) 1 1 Analogue input unit AX EX600-AXA2 (2 points) 4 0 Analogue output unit AY EX600-AYA2 (2 points) 0 4 Analogue I/O unit AM EX600-AMB2 (2/2 points) 4 4 1: The occupied bytes of input of the wireless unit (EX600-W###) will vary depending on the setting

SMC Wireless System PROFINET compatible

B (8 points) 0 1 EX600-DY#E (16 points) 0 2 Digital output unit DY EX600-DY#F (16 points) 0 2 EX600-DM#E (8/8 points) 1 1 Digital I/O unit DM EX600-DM#F (8/8 points) 1 1 Analogue input unit AX EX600-AXA2 (2 points) 4 0 Analogue output unit AY EX600-AYA2 (2 points) 0 4 Analogue I/O unit AM EX600-AMB2 (2/2 points) 4 4 1: The occupied bytes of input of the wireless unit (EX600-W###) will vary

CYP

A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3) 0.05 0.05 0.05 0.04 0.04 0.04

CYPSeries

F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)

CYPSeries

F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Clean Room Rodless Cylinder Series CYP ø15, ø32

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x L

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N T, F, N are order made specifications.

Round Type Hydraulic Cylinder

1/8 81 M24 x 1.5 13 28 19 15 143 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 31 f8 7.5 1/8 87 M30 x 1.5 13 36 19 15 159 40 Up to 800 21 M33 x 2 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 34 f8 7.5 1/4 108 19 44 24 21 183 Axial foot type: CHML Width across flats B2 H N GA F N GB F Rc P Rc P 2 x NN Width across flats B1 Effective thread H2 H1 D I 4 x LD LH MM A K NC Width across

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

MHL2

F = one finger thrust.

Parallel Style Air Gripper: Wide Type Series MHL2

4 x M5 x 0.8 through (Thread for mounting attachment) (mm) J 98 152 192 A B C D E F G H 40 70 90 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Note 1) J dimension is at fully closed.

MHL2

F = one finger thrust.

Air Slide Table Series MXP

Table Deflection (Reference Values) Table displacement due to pitch moment load Displacement on A when load is applied on F . Table displacement due to yaw moment load Displacement on A when load is applied on F . Table displacement due to roll moment load Displacement on A when load is applied on F .

Prevents Micro-Bubbles

type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D E F G H1 H2 J K L M N P

VDW Series

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Contact SMC regarding other voltages.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Contact P/A regarding other voltages.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

1

Port thread GB Width across flats B1 H1 C NA C NA D E E AL A H S + Stroke ZZ + Stroke F NA C NA C MM 4 x JA 4 x JB Female thread MM Depth A1 H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 JA JB KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 M4 x 0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x