Mechanically Jointed Rodless Cylinders

D-M9V D-M9W D-M9WV D-M9 D-M9V D-M9W D-M9WV Auto switch model Auto switch model D-A9 D-A9V D-A9 D-A9V Bore size Bore size B 88 106 121 156.5 197.5 231 266.5 B 94 116 135 172.5 215.5 249 284.5 A 26 26 33 40.5 46.5 47 57.5 A 32 36 47 56.5 64.5 65 75.5 B 84 102 117 152.5 193.5 227 262.5 B 90 112 131 168.5 211.5 245 280.5 A 22 22 29 36.5 42.5 43 53.5 A 28 32 43 52.5 60.5 61 71.5 16 20 25 32 40

Mechanically Jointed Rodless Cylinder Series MY2

Proper Auto Switch Mounting Position (Detection at stroke end) C D A B D-A9, D-A9V D-M9, D-M9V, D-M9W, D-M9WV B B Series model A Series model A Operating range Operating range MY2C16 MY2C16 44 116 48 112 MY2H16 MY2H16 46 114 50 110 MY2HT16 MY2HT16 11 8.5 70 90 74 86 MY2C/H/HT25 MY2C/H/HT25 54 156 58 152 MY2C/H/HT40 MY2C/H/HT40 85 245 89 241 Series model C Series model C D D Operating range

MXH Series Compact Slide

D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

CEP1

(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV

Air Slide Table/Long Stroke Type Series MXY

(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Auto switch operating range A B A B A B 54 MXY6 34 MXH 59 5 MXY8 39 MXU 67 MXY12 47 MXS Solid State Auto Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside MXQ (mm) B B Model Mounting Auto switch operating range MXF A B A B A B 50 MXY6 3 38 MXW 55 MXY8 3.5 43 MXJ 63 MXY12 3 51 MXP Lead wire entries parallel

CRQ2

M ab BA BA BB D (AU)Max.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

Proper tightening torque (Nm) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) 6, 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% M3 M4 M5 M6 C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Low-Speed Rotary Actuator

IC Grommet Yes Reed circuit 100V A93V*2 A93 Relay, 2-wire 24V 12V PLC No 100V or less A90V A90 IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1m type lead wire is only applicable to D-A93.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

Hydraulic Cylinder

You do not need to specify "N" (i.e., without lead wire) for D-A3, D-A44, D-G39, and D-K39. This is the only standard specification automatically available for these models. D-A9V, M9V, M9WV, and M9A(V) models cannot be mounted on 25 to 40. Since there are applicable auto switches other than listed, refer to page 310 for details.

Air Slide Table Series MXQ

Nil (Example) A93 3m .

Round Type Hydraulic Cylinder ø 20, ø 25, ø 32, ø 40 CH  M Series

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked "" are produced upon receipt of order. Do not indicate lead wire length symbol N (none) for types D-A3, D-A44, D-G-39 or D-K39.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 40mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: Standard (Rod End Female Thread, Without thread on 4mm bore), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: E (Simple Joint B Type + Joint)

Magnet: D (Built-in), Mounting: B (Through Hole [Standard]), Bore Size: 40mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: Standard (Rod End Female Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Magnet: D (Built-in Magnet), Mounting: B (Through-hole, Standard), Type: Pneumatic, Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke 1: 25mm, +: None, Stroke 2: None, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: Z (ø12 to ø25, 2 Surfaces; ø32 to ø100, 4 Surfaces), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the

Magnet: D (Built-in Magnet), Mounting: B (Through-hole, Standard), Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: Z (ø12 to ø25, 2 Surfaces; ø32 to ø100, 4 Surfaces), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Magnet: D (Built-in Magnet), Mounting: B (Through-hole, Standard), Bore Size: 40mm, Port Thread: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: Standard, Rod End Female Thread, Auto Switch Groove: Z (ø12 to ø25, 2 Surfaces; ø32 to ø100, 4 Surfaces), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.