Bore Size: 20mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 20mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Centralized Piping, Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 25mm, Port Thread: M Thread (ø16) Rc Threads (ø25, ø40), Stroke: 300mm, Stroke Adjustment Unit: Left, Right Side w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 40mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -

Bore Size: 25mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -

Bore Size: 40mm, Port Thread: NPT, Piping: Standard, Stroke: 300mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -

Bore Size: 32mm, Thread Type: Bore 12-25: M Thread; Bore 32-40: Rc, Stroke: 300mm, Cushion: 2 pcs. Adjuster Bolt, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 32mm, Thread Type: Bore 12-25: M Thread; Bore 32-40: Rc, Stroke: 300mm, Cushion: 2 pcs. Adjuster Bolt, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: B (Basic Style), Bore Size: 25mm, Thread: Rc, Stroke: 300mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: B (Basic Style), Bore Size: 32mm, Thread: Rc, Stroke: 300mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Ejector Valve Unit Series ZYY/ZYX 1

(Length 300 mm) Without lead wires Without connector Misc.

NAAMS Standards Compliant

D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VEX1

1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

energy saving effect

HRSH250/300-A-20 (Air-cooled 200 V type) HRSH250/300-A-40 (Air-cooled 400 V type) Ventilation air inlet Ventilation air inlet Ventilation air outlet 1035 Eye bolt M12 (4 places) Operation display panel 850 Handle Handle Dustproof filter Breaker handle Note) Circulating fluid outlet Rc1 Automatic fluid fill port Rc1/2 Overflow port Rc1 Circulating fluid return port Rc1 1720 Contact input/output