Booster Regulator/Air Tank

Connected to VBA20A, 40A VBAT20A1 Material: Carbon steel Connected to VBA22A, 42A Tank IN port Rc 1/2 Booster regulator IN port Booster regulator IN port Tank OUT port Rc 1/2 C C Spare port Rc 1/2 EXH: C EXH: C (A) (A) D (B) (B) OUT OUT 305 180 206 206 4 x 13 4 x 13 50 50 200 100 100 400 Drain port Rc 1/4 200 674 (mm) D Note) 469 493 685 A 481 520 444 477 B 394 429.8 394 429.8 C Rc 3/8

mlu

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 D 16.5 18 21 26 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

/

PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

d e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized

Fieldbus system PROFIBUS DP compatible SI unit

AD value C Communication speed The speed at which the fieldbus sends and receives data. It depends on higher-level equipment (PLC, etc.) and is measured in bps (bits per second). Current consumption The current necessary to operate each unit. D Diagnosis Information Consists of the standard diagnosis information defined by PROFIBUS DP and the diagnosis information unique to the product.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Retaining rings are included. 8 25 14 Type C 5 Type C 5 6.4 12 1.5 0.7 1.5 0.7 5 5 5 4.8 4.8 M5 x 0.8 22.7 18.3 16.6 12.2 Double Knuckle Joint Mounting Nut Rod End Nut d d MM L ND hole H10 Shaft d9 R1 12 C C + 0.2 0 + 0.2 0 A1 L1 NX U1 12 7 B H B H Knuckle pin and retaining ring are packaged together.

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

A B C D Switch Internal Circuit Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

Valve Single Unit

Note 2) The withstand voltage specification for the wiring unit section is JIS C 0704, Grade 1 or its equivalent.

ITV

/C or less Operating temperature range 0 to 50C (No condensation) Equivalent to IP65 VEX Enclosure Connection type Built-in One-touch fittings SRH z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size SRP z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size Weight Note 1) SRF 100 g or less (without option) Note 1) Indicates the weight of a single unit

AIR SLIDE TABLE

28.1 20.1 20.1 28.1 28.1 47.1 47.1 MXQ16(A,C) 18.6 18.6 18.6 18.6 18.6 18.6 18.6 18.6 34 28 28 35 35 41 60 60 MXQ20(A,C) 30.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 34.9 35.9 35.9 35.9 41.9 50.9 75.9 75.9 75.9 MXQ25(A,C) 32.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 42.7 41.7 41.7 41.7 54.7 54.7 40.7 79.7 77.7 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125

CE

D-F7PV M9NAV 2 D-M9NAV A79W D-A79W M9PAV D-M9PAV M9BAV D-M9BAV F7BA D-F7BA F7BAV D-F7BAV D-F79F 2 F79F F7NT D-F7NT 223 *1 AC100240V D DC24V C 05 5m 10 10m 15 15m 20 20m RS-232C B RS-232C + BCD *1)() C ()CE1 NPN PNP 2-3 CE1 CEU5 CE1 CEU5 CE1-R 23m 9 CE1 CE1-R*CE1 () () CE1 CE1-RC C () CE1 CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3. 3-1 1.5MPa 1.0MPa 12 2063

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

side traveling parallelism to A side w D side traveling parallelism to B side D side w q LEJl40 0.05 0.03 C side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

VQ7-6/7-8

FHG FJG FIG FHG FJG FIG VQ7-8-DVQ7-8-D-R VQ7-8-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8-D-R VQ7-8-DNo. 1 2 3 4 5 6 7 8 9 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Mini Y seal Pilot valve assembly Double check spacer AXT510-13 VQ7060-13-2 VQ7080-13-1 VQ7080-13-3 37 x 1.6 NBR NBR NBR

Lubricator

Bowl assembly for AL20-D Semi-standard symbol 6 C 6C Semi-standard: (Standard) Semi-standard: C Piping port thread ty pe (7) Part No. Piping port thread ty pe (7) Part No. Rc Rc C2SL-D C2SL-C-D G G NPT C2SL(-Z)-D NPT C2SL-C(Z)-D Appearance and part No. Semi-standard: 6 Semi-standard: 6C (7) Part No. Piping port thread ty pe (7) Part No.

CHA

D-A9, M9, M9W, M9A auto switches are shipped together (not assembled).

Gun Type Ionizer

Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192