“

OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR32l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR32l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 782 Regulator IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR12l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon panel nut

Mini Free Mount Cylinder

3 w e q !1 r y o e t !2 4 Built-in magnet Without magnet Single Acting, Spring Return u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male threaded Replacement Parts: Seal Kit Double Acting Component Parts Contents No. Description Note Material Kit no.

90

OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Digital Flow Switch

E: Modified errors in text. F: Modified errors in text. G: Contents revised in several places. [September 2016] H: Contents revised in several places.

Digital Flow Switch

) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input 3 [REACUM] Accumulated flow external reset page 47 [F22] [ Fr E] Setting of analogue output 4 [ oFF] Variable

Fieldbus system (PROFIBUS DP compliant)

SY 3000, 5000, 7000, 9000 SYJ 3000, 5000, 7000 S0700 0700 VQZ 1000, 2000, 3000 Plug-in type Valve series Model No.

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

AR20-B to AR60-B

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Vacuum Pad

A A Width across flat D (Hexagon) Width across flat 8 (Hexagon) 3 3 B E E Width across flat 12 (Hexagon) B Width across flat 8 (Hexagon) 6 8 5 10.5 E 2.5 11.7 6.6 Dimensions Dimensions A B E 4 3 A B Model ZPT4-A6 ZPT4-A8 M6 x 1 M8 x 1 D 8 12 E 3 4.5 Model ZPT2-A5 ZPT2-A6 M5 x 0.8 M6 x 1 21 26 26 16 ZPT3-A6 Adapter part no. ZPT1-B4/B5 Adapter part no.

Vacuum Pad

A A Width across flat D (Hexagon) Width across flat 8 (Hexagon) 3 3 B E E Width across flat 12 (Hexagon) B Width across flat 8 (Hexagon) 6 8 5 10.5 E 2.5 11.7 6.6 Dimensions Dimensions A B E 4 3 A B Model ZPT4-A6 ZPT4-A8 M6 x 1 M8 x 1 D 8 12 E 3 4.5 Model ZPT2-A5 ZPT2-A6 M5 x 0.8 M6 x 1 21 26 26 16 ZPT3-A6 Adapter part no. ZPT1-B4/B5 Adapter part no.

Vacuum Pad

A A Width across flat D (Hexagon) Width across flat 8 (Hexagon) 3 3 B E E Width across flat 12 (Hexagon) B Width across flat 8 (Hexagon) 6 8 5 10.5 E 2.5 11.7 6.6 Dimensions Dimensions A B E 4 3 A B Model ZPT4-A6 ZPT4-A8 M6 x 1 M8 x 1 D 8 12 E 3 4.5 Model ZPT2-A5 ZPT2-A6 M5 x 0.8 M6 x 1 21 26 26 16 ZPT3-A6 Adapter part no. ZPT1-B4/B5 Adapter part no.

Vacuum Pad

A A Width across flat D (Hexagon) Width across flat 8 (Hexagon) 3 3 B E E Width across flat 12 (Hexagon) B Width across flat 8 (Hexagon) 6 8 5 10.5 E 2.5 11.7 6.6 Dimensions Dimensions A B E 4 3 A B Model ZPT4-A6 ZPT4-A8 M6 x 1 M8 x 1 D 8 12 E 3 4.5 Model ZPT2-A5 ZPT2-A6 M5 x 0.8 M6 x 1 21 26 26 16 ZPT3-A6 Adapter part no. ZPT1-B4/B5 Adapter part no.

7.5

For built-in silencers, the 3/5(E) ports are plugged.

Refrigerated Air Dryers Series IDF/IDU

Port size (E) (A) (B) (D) HAA HAW AT IDF IDU (C) (C) IDFA IDFB ID IDG Dimensions (mm) Mass (kg) Applicable dryer Port size Rc A B C E D Part no.

MGP

\E Support...

NCQ8

J M2 bolt circle W M1 E I dia.