Vacuum -Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !
wire length L0: 600 mm L1: 1500 mm U side 3.5 163 L2: 3000 mm 44 62 73 Station number 9 9 2-Rc 1/8 (External pilot port) Electrical entry on U side (LU) 15 12 X n Manual override 2 B 4 A 8 2 B 4 A B A B A B A B A B A A A 7 SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A Indicator light 2 B 4 A 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 50.5 P = 25 P = 25 2 B 4 A 1 44 12 X Stations
4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4
C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 36 MWB Series Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 DA MM DA MM MM MM 30 30 H AL A H L A H AL H AL L K LB K Symbol: A28 Symbol: A29
D-A59W Bore size (mm) A B A B A B A B A B A B A B A B A B A B A B 40 50 63 80 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 9.5 8.5 5.5 4.5 3 2 5 4 2.5 1.5 6 5 3.5 2.5 11 10 0 0 1.5 0.5 0 0 12.5 11.5 8.5 7.5 6 5 3 2.5 5.5 4.5 9 8 6.5 5.5 14 13 2.5 1.5 4.5 3.5 3 2 16.5 13.5 12.5 9.5 10 7 7.5 4 9.5 6.5 13 10 10.5 7.5 18 15 6.5 3.5 8.5 5.5 7 4 100 18 16 14 12 11.5 9.5 9 6.5 11
Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.
Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3
D-C7m/C80 D-C73C/C80C D-H7m/H7mW D-H7BA/H7NF Band mounting BJ2-010 (A set of band and screw) BJ2-016 (A set of band and screw) BQ2-012(S) (A set of a and b) BQ2-012(S) (A set of a and b) Set screw (Accessory) D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA Note 5) D-M9mAV Note 5) D-A9m D-A9mV Note 4) Rail mounting BQ2-012 BQ2-012S a Auto switch mounting screw b Auto switch mounting bracket Nut (Cylinder
A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.
A One-touch fitting for 12 is attached to each port.
Disassembly procedure Step 1 Step 2 Bolt b 3 1 2 O-ring 4 Handle assembly Bottom surface of groove to discharge gas Bolt a Body Cover Heater The heater is removed by loosening Bolt a. Bolt a is behind the Cover. Remove the Cover using a watchmaker's screwdriver. Loosen the Bolt b gradually with the valve opened a little in numerical order.
Note 2) A voltage symbol (same as How to Order) is entered into the mark * 5 XL-OMU0002-A 3.
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002
Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80
When using a rod boot, a stroke range of up to 1000 mm is available. Please consult with SMC when exceeding a 1000 mm stroke.
Nq Body size 20 25 30 40 50 60 Symbol Description Nw With backflow function Nil Without backflow function K*1 With backflow function + Ne Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Nr Port size a Mounting Nil Without mounting option B*3 With bracket H With set nut (for panel mount) + Nil Without pressure gauge E Square embedded type pressure gauge (with
. * A knuckle joint pin is not provided with the single knuckle joint.
4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire