AC Servo Motor Driver (SSCNET /H Type) Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.
Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3
A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.
A One-touch fitting for 12 is attached to each port.
Disassembly procedure Step 1 Step 2 Bolt b 3 1 2 O-ring 4 Handle assembly Bottom surface of groove to discharge gas Bolt a Body Cover Heater The heater is removed by loosening Bolt a. Bolt a is behind the Cover. Remove the Cover using a watchmaker's screwdriver. Loosen the Bolt b gradually with the valve opened a little in numerical order.
Note 2) A voltage symbol (same as How to Order) is entered into the mark * 5 XL-OMU0002-A 3.
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002
Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80
When using a rod boot, a stroke range of up to 1000 mm is available. Please consult with SMC when exceeding a 1000 mm stroke.
Nq Body size 20 25 30 40 50 60 Symbol Description Nw With backflow function Nil Without backflow function K*1 With backflow function + Ne Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Nr Port size a Mounting Nil Without mounting option B*3 With bracket H With set nut (for panel mount) + Nil Without pressure gauge E Square embedded type pressure gauge (with
. * A knuckle joint pin is not provided with the single knuckle joint.
4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire
Valve Type: XYC (In-line Type, Double Acting, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: 1, Auto Switch: M9N--Solid State, Gen.
Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: 1, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)], Seal Material: XN1 (EPDM 2101-80), Seal Replacement: A (2, 3)
Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9P--Solid State, Gen.
Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)], Seal Material: XF1 (FKM, Same Specs as Standard FKM), Seal Replacement: A (2, 3)
Accessories 2 Nil No bracket V Single knuckle joint W Double knuckle joint * A knuckle joint pin is not provided with the single knuckle joint. * Rod end bracket is shipped together with the product.
Valve Type: XYA (In-line Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A [2 pcs (Valve Open/Closed)]