MRQ

C + D = 3.5 + 24 = 27.5 /min CRQ B C Rotary part MRQ A D MSQ Linear part MSUB 0 1 2 Operating time (S) 1.5-7 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A A73 No. of auto switches mounted Mounting style F: Flange on the rod side B: Basic style Rotation 2 1 0 Linear motion 0 1 2 OS SS 2S O2 S2 SO 2O Without auto switch Auto switch/Rail mounting Refer to the table

Rotary Cylinder Series MRQ Size: 32, 40 1

C + D = 3.5 + 24.3 = 27.8 l/min B C CRQ2 Rotary motion parts MSQ A D Linear motion parts MRQ 0 1 2 DOperating time (S) 2011-10-7 8 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A J79W Number of auto switches Mounting style F: Flange on the rod side B: Basic style Rotation 0 1 2 Linear motion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

VZ100/300/500

[dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv VZ312 VZ322 VZ314 VZ324 N.C. 0.53 0.66 1.2 1.3 0.45 0.45 0.41 0.37 0.14 0.18 0.32 0.33 0.47 0.66 1.1 1.2 0.39 0.45 0.46 0.48 0.12 0.18 0.32 0.34 M5 75 Body ported N.O.

Microspeed Cylinder

Use the correct plyers (C type snap ring mounting tool) for installation and removal. 1. Replacement parts/Seal kits To order the kits, use the order numbers for each bore size. 2. Be careful even when using the correct plyers (C type snap ring mounting tool).

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

AC Servo Motor Driver (CC-Link Type ）

[C][0].

MTS

7 Type C snap ring for hole Carbon tool steel Aluminum alloy !8 !

FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Filter for Cleaning Solvent Quick Change Filter Series FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult P/A for fluids other than those listed. 6 Series FQ1 Made to Order Consult P/A for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

13

38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Cylinder with Lock Series CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 13 Series VQZ How To Order Manifold Connector Kit Preferred Option Program How To Order: VQZ100 Base Mounted Manifold VV3QZ 1 5 08 N7T C Option Series None DIN rail mounting (DIN rail standard length) External pilot 1 VQZ100 D R Manifold type 5 Base mounted Kit C Connector Number

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(dm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Actuation type Valve model Actuation type 1, 5, 3 L/M plug W M8 L/M plug W M8 1, 5, 3 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal (sbar)) Cv b C (dm3/ (sbar)) Cv b C (dm3/ (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 108 133 (sbar)) (sbar)) Single Single 2 position 125 167 2

Compressed Air Cleaning Filter Series

The C type is only suitable for modular connection.

NCA1

CB CD CW D DD E EA EE F G J L LR M WF XD Y LF P ZB 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 3/4 1/2 1/2 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note 2) Based on JIS C 4003 Option Foot bracket (With screw) (1) Part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.