CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

Digital Flow Switches Series PF2A

Note 7) The flow switch conforms to the CE mark. 1 Digital Flow Switch Series PF2A For Air How to Order PF2A5 Remote Type Sensor Unit 10 01 C Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Option (Refer to page 35.) None e-con connector x 1 pc. Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Caution Locked position The 10-SYJ3000/5000/7000 and 10-SYJ300/500/700 series can be mounted on the same manifold.

3 Port Air Operated Valve

3 Port Air Operated Valve VPA300/500/700 Series RoHS SYA SYJA VZA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA VPA3 1555 VPA300/500/700 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C [dm3/(sbar)] Type of actuation Port size Voltage Light/surge voltage suppressor Manual override Electrical entry VPA300 N.C. 2(A) 1/8 1/4 4.2 (P)1 3(R) VPA500

Guide Cylinder Series MGG

Contact P/A in this case. 1 Guide Cylinder Series MGG Models and Specifications JIS symbol Models and strokes Long stroke (mm) Standard stroke (mm) Model Bearing type Bore size (mm) 20 250, 300, 350, 400 75, 100, 125, 150, 200 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900

0.4

N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

MHK2

MHK2-20S MHK2-20C 80 60 70 Gripping force (N) Gripping force (N) 50 60 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 40 Model Allowable moment Allowable Moment Pressure 0.6 MPa 40 0.5 MPa 30 0.5 MPa 30 (Nm) 0.4 MPa 0.4 MPa 20 20 MHK2-12S/C 0.05 0.3 MPa 0.3 MPa 0.3 MPa 10 MHK2-16S/C 0.12 10 MHK2-20S/C 0.25 0 0 20 40 60 80 20 40 60 80 MHK2-25S/C 0.49 Gripping point L (mm) Gripping point

MHK2

MHK2-20S MHK2-20C 80 60 70 Gripping force (N) Gripping force (N) 50 60 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 40 Model Allowable moment Allowable Moment Pressure 0.6 MPa 40 0.5 MPa 30 0.5 MPa 30 (Nm) 0.4 MPa 0.4 MPa 20 20 MHK2-12S/C 0.05 0.3 MPa 0.3 MPa 0.3 MPa 10 MHK2-16S/C 0.12 10 MHK2-20S/C 0.25 0 0 20 40 60 80 20 40 60 80 MHK2-25S/C 0.49 Gripping point L (mm) Gripping point

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Electric Actuators

128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106

IDU/IDF

(C) 35 40 45 50 30 Outlet air pressure dew point (C) Ambient temp.

4-channel Flow Monitor ( compatible)

Item Display Content [Std] Standard condition [rEF] Selection of reference condition [nor] Reference condition Standard condition: In dry air with a temperature of 20 C and absolute pressure of 101.3 kPa Reference condition: In dry air with a temperature of 0 C and absolute pressure of 101.3 kPa Press the SET button to set.

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

42

C kit (Plug lead type) 6.

Air Cylinder Series MB

500, 600, 700, 800 Oversized rod cylinder XB5 125 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (150C) XB6 Intermediate strokes are available.

NCA1

Zinc chromated Tie rod Carbon steel 4 19 Rod seal NBR 1 20 Stroke (In inches and hundredths) Bore 500 600 800 Gland seal NBR 1 21 22 Cushion seal Urethane 2 Cylinder tube gasket NBR 2 23 NCA 500 RG Bore 500 600 800 Special options Nil XB5 XC35 XB5C35 Standard Oversized rod Coil scraper Oversized W/ Coil scraper NC A 500 26A 0400 D NCA 500 11 0400 B Special options Nil XB5 XB6 XB7 XB5B6 XB5B7

CHKD/CHKG

CHKGL--XC64 A C C B 293

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133