Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

0.4

Symbol Specifications 4-position dual 3-port valve (C) Standard (0.4 W) Nil B K Note 1) 4 2 C Note) High-speed response type (0.95 W) 1 5 3 N.C. N.O.

0.4

B A 2 4-position dual 3-port valve (C) 2-position double (Rubber) (A) 4 (B) 2 (A) 4 (B) 2 Note) C 5 (R1) 3 (R2) 1 (P) C: Locking type (Manual) 1 (P) 5 (R1) 3 (R2) N.C. N.O.

0.4

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

53

[L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] * Refer to the following for the

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

Vacuum System Peripherals:

ZP Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Port size Rc Model Orifice dia.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

Air Slide Table

Rubber Stopper (AS, AT, A) Metal Stopper (CS, CT, C) (mm) A (mm) A B B C C Model Model MXQR6 MXQR8 MXQR12 MXQR16 MXQR20 MXQR25 MXQR6 MXQR8 MXQR12 MXQR16 MXQR20 MXQR25 26.5 25.5 10 10 26 25 29.5 28 10 9.5 29 30.5 33.5 32 9 8.5 33 35 34.5 33 6.5 6 34 32.5 37.5 37 3.5 4 37 36.5 42.5 40 2.5 1 42 39.5 28 Made to Order Individual Specifications: Air Slide Table/Reversible Type Series MXQR Please

High Power Cylinder Series RHC

VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2

CNG

IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15

Compact Rotary Actuator Series CRQ2

Positioning pin hole Counter-clockwise A port 5 Adjustment bolt A (For counter-clockwise rotation end adjustment) 95 22 .5 ge an Adjustment bolt B t r (For clockwise rotation end adjustment) en m e s st wi ju ck ad lo d -c B port en er Clockwise nt on Cl u o ti 0 o ad C ta se ck 19 ro wi ju wi k c st lo s C ge e m ro With Adjustment Bolt en an ta t r ti o n n r an e n d ge tio Size Adjustment

CNG

IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Thermo-con

Contents D A A 200 to 220 VAC B 200 to 220 VAC C Unused C B D PE Other connectors are the same as those for the HEC006-W2l. 155 Series HEC-W Alarm This unit is equipped as standard with a function allowing 15 kinds of alarms to display on the LCD and can be read out by serial communication.

Series CG1 precision air cylinder has 8 bore sizes and can meet any application need. The tube is impact extruded aluminum to produce an extraordinarily smooth finish, allow low break-away pressure and smooth stroke action. Eight mounting options are available. Auto switch capable. End lock cylinder, CBG1, Double acting, single rod, 7 mounting styles available, Bore sizes *: 20, 25, 32,

Series CG1 precision air cylinder has 8 bore sizes and can meet any application need. The tube is impact extruded aluminum to produce an extraordinarily smooth finish, allow low break-away pressure and smooth stroke action. Eight mounting options are available. Auto switch capable. End lock cylinder, CBG1, Double acting, single rod, 7 mounting styles available, Bore sizes *: 20, 25, 32,

5 Port Solenoid Valve

(ARBQ5000-00 A B C 1 5) q AXT632-25-6 (M4 x 114) 4 Valve + Interface regulator SQ w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate.