VDW Series

1 D side 2 3 4 5 n U side Stations VDW13-*G-* VDW13-*G-* VDW13-*G-* VDW13-*G-* n-M5 x 0.8 (OUT port) 61 26.5 19.6 13 1.5 7.7 P = 17.5 8.1 4-M3 x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175

2/3 Port Valve

40A, 50A Flange connection Applicable flange Pilot port Rc(PT) A Model B C D E F H J K L 32 40 50 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 VNC5-32F VNC6-40F VNC7-50F 100 105 120 36 42 54 12 12 14 310.5 326 350 278 293.5 317.5 VX Port size: 65F, 80F Flange connection VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175

VQ

38 Equation: L1=10n+32 L2=10n+43 n: Station (Max. 18) Dimensions n L 2 52 63 83 112.5 123 11 142 153 173 200 210.5 3 62 73 93 112.5 123 12 152 163 183 212.5 223 4 72 83 103 125 135.5 13 162 173 193 212.5 223 5 82 93 113 137.5 148 14 172 183 203 225 235.5 7 102 113 133 162.5 173 6 92 103 123 150 160.5 15 182 193 213 237.5 248 8 112 123 143 162.5 173 16 192 203 223 250 260.5 9 122 133 153 175

VQ7-6/7-8

, R2 for Rc3/4 only U side U side 18 Manual override 23 R4.5 R4.5 P= 56 60 (73) 60 (73) P= 56 B B B B B 14 42 18 13 13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side D side 40 (53) D side (2n-Rc1/8) 17 2 82.5 34 14 154 (single) 82.5 4n-Rc3/8, 1/2 175.5 (double) 154 (single) 59 62 94 175.5 (double) 180.5 175.5 (3 position) 180.5 175

Multistage Ejector Series ZL112/212 1

Rc1/8 7 P With vacuum adapter ZL112-GN V 61 2-5.4 Mounting hole Vacuum pressure switch Exhaust port With digital vacuum pressure switch ZL112-E P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label EJECTOR MULTISTAGE 59.5 59 56 8.5 30 Section A/ With Digital Vacuum Pressure Switch 4.5 166 175

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Pertormance Prechion and slrengh in conliguralions to meel nost appljcations Plcision vs, Moment loading Unmatched Versatility from The leader in Pneumatics SLIDE TABLE Technology Work Table ' I cytinder , , I Conventional Syslem Linear Bearing univcEal lilourl Slide table MuHiple moLrnting opions Standard Stroke (mm) 25 30 40 50 60 75 100 sffi 125 150 '175 200 225 250 275 300 350 400 L I

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Momnt loading Conventional Systetn lHvatal ou dldebL Multipl mounting optims 30 Standard Strcke (mml 125 150 175 200 225 250 275 300 350 400 I ffi75 100 60 I s OF so 'a so =ooi ;slisawl[soww so I T sow lsawjl:ew11 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a t a a a a a a a a a a a a a a a a a a a a a a a a a a '"?FF_PryFry4F!

！ Contact our sales office for delivery dates and prices as this is a special model. SP112X-012E P: PZ P.G.Information (Specialized Product) SMC CORPORATION Power Clamp Cylinder：φ25 4-14-1,SOTO-KANDA, CHIYODA-KU,

. * Unclamp --> Clamp: 1 sec. or more * Unclamp --> Clamp: 1 sec. or more CKZT25 Allowable Load Weight CKZT25 200 Distance from Fulcrum to Clamping Position: L 90 30 175 150 105 45 125 100 75 0 0.5 1 1.5 2 Fulcrum Allowable Load Weight Wkg W(Kg) Allowable Lock Moment UnitNm Allowable Lock Moment 75 * The moment at which the clamp arm is locked in a clamped state and exhausting air Max.Clamping

pa

LVQ LQ LVN TI/ TIL PA PAX PB Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter AIR SUP FLUID OUT FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 17-5-161 Series PAX Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (Pilot air supply

7.4

C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5 175

Compact

71 94 118 141 165 Minimum Stroke for Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175

NARM Series

Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Standard Specifications 4 Ways of Connection Fluid Air Proof pressure psig (MPa) 175 (1.2) Max. operating pressure psig (MPa) 120 (0.8) Set pressure range psig (MPa) 7~100 (0.05 to 0.7) Ambient and fluid temperature 23~140F (5 to 60C) (No freezing) Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief

Valve Single Unit

.: 10 (A, B port) L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 141.1 (3 position) 128.6 (3 position) 2 stations 61 49 20 stations 403 391 3 80 68 4 99 87 5 118 106 6 137 125 7 156 144 8 175 163 9 194 182 10 213 201 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 Stations n L1 L2 1-6-63 Series SX3000

5 Port Air Operated Valve

position M5 x 0.8 Double 0.49 0.40 0.13 0.52 0.35 0.13 120 Single 0.76 0.22 0.17 0.53 0.28 0.13 93 VFA120-01 2 position 1/8 M5 x 0.8 Double 0.76 0.22 0.17 0.53 0.28 0.13 116 Single 3.0 0.38 0.78 2.8 0.30 0.67 135 2 position Double 3.0 0.38 0.78 2.8 0.30 0.67 158 Closed center 2.4 0.31 0.64 1.8 0.37 0.46 VFA330-01 1/8 3.0 [2.5] 0.32 [0.28] 0.76 [0.62] 2.6 0.37 0.70 Exhaust center 3 position 175

C92

25 30 35 45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Single rod Piston speed 50 to 750 mm/s Allowable kinetic energy 0.035 J 0.090 J Mounting style Basic style, Axial foot style, Rod side flange style, Double clevis style Standard Stroke (mm) Standard stroke Maximum manufacturable stroke Bore size (mm) Made to Order Specifications (For details, refer to page 1380.) 15, 30, 45, 60, 75, 100, 125, 150 10 400 15, 30, 45, 60, 75, 100, 125, 150, 175

3 Port Solenoid Valve Series VQ100

0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum 18 stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143 162.5 173 122 133 153 175

3 Port Solenoid Valve Series VQ100 1

0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum 18 stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103 125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143 162.5 173 122 133 153 175

Thermo-chiller Series HRZ Fluorinated Fluid Type

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

PSE57  Series Pressure Sensor for General Fluids

574-02 PSE575/576/577-02 Port size R1/8 M5 x 0.8 R1/4 M5 x 0.8 R1/4 M5 x 0.8 Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) Square ring: FKM Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) O-ring: FKM + Grease Materials of parts in contact with uid Without lead wire and M12 connector 88 g 95 g 103 g Weight With lead wire and M12 connector 175