Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A6 (M6X1)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A5 (M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: F (Fluoro Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A5 (M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: F (Fluoro Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A6 (M6X1)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A6 (M6X1)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A5 (M5X0.8)

Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GN (Conductive NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

AS-FG

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: F (Fluoro Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Model: 16 (Port A One-touch Fitting, Port B One-touch Fitting), Applicable Tube OD: 04 (4mm), Port Size Applicable Tube: 04 (4mm), Number of Ports: 3 pcs.

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)