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power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc 1/8 1(P), 3(R) port Manual override (Non-locking) Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 2-4.5 (Mounting hole) 67.5 59 19 17 2 R P P R mPm 7 20 34 2.3 Pg.7 4-Rc 1/8 1(P), 3(R) port A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 300 (Lead wire length) n-Rc 1/8, M5 x 0.8 2(A) port 7 20 34 Courtesy of

L Type Plug Connector : NVJ3O2O-OLOO-M3 M Type Plug Connec{or: NVJ3O2O-OMOO-M3 (D : inch (mm) M Type Plug Connector: NVJ3O4O-OMOO.M5 inch (mm) Grommet(G). (H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

L Type Plug Connector : NVJ3O2O-OLOO-M3 M Type Plug Connec{or: NVJ3O2O-OMOO-M3 (D : inch (mm) M Type Plug Connector: NVJ3O4O-OMOO.M5 inch (mm) Grommet(G). (H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

L Type Plug Connector : NVJ3O2O-OLOO-M3 M Type Plug Connec{or: NVJ3O2O-OMOO-M3 (D : inch (mm) M Type Plug Connector: NVJ3O4O-OMOO.M5 inch (mm) Grommet(G). (H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

EXW1 EXW1 Up to 100 m V.1.0 / V.2.0 Available *1 EXW1 EXW1+EX600 *2 V.1.0 Not available EXW1 EX600 Up to 10 m V.1.0 Not available EX600 EXW1 Up to 10 m V.1.0 Not available Available *3 EX600 EXW1+EX600 Up to 10 m V.1.0 Not available Available *3 EX600 EX600 Up to 10 m V.1.0 Not available Available *1 Available in protocol V.2.0. *2 Up to 100 m between an EXW1-series Base and Remote, and up

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

(12) 0 R/W Device Access Lock Y Refer to device access lock (P.19) 0x000C 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com 0x0012 (18) 0 R Product Name N Example: D-MP025A 0x0013 (19) 0 R Product ID N Example: D-MP025A 0x0014 (20) 0 R Product Text N Actuator Position Sensor (21) 0 R Serial Number N 8 octets fixed character string 0x0015 (22) 0

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.

Auto switch model 2 (Same side) 2 (Different sides) 1 2 1 D-C7/C80 Band mounting style Rail mounting style 50 15 10 D-H7/H7W 60 15 10 D-H7NF D-C73C/C80C Note) Small round head screws 65 15 10 D-H7C Plate D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V D-J79C D-A79W/F7W D-J79W D-F7WV/F79F Solenoid valve 10 5 Pipe gasket 5 5 15 10 2.

mounting style Rail mounting style 15 stroke 80 121 D-H7/H7W 15 60 10 30 stroke 88 140 Basic weight D-H7NF 45 stroke 98 164 D-C73C/C80C Note) 15 65 10 60 stroke 110 189 D-H7C Axial foot style 7 19 Mounting bracket weight D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V D-J79C D-A79W/F7W D-J79W D-F7WV/F79F 10 Rod side flange style 5 13 5 Mounting nut and rod end nut are included in the basic

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

MHY D-Y59/Y69 D-Y7P(V)/Y7W(V) MHW2-40D Air gripper model MHW MHW2-50D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 2 2 2 (mm) -X Protrusion (mm) In-line electrical entry type Perpendicular electrial entry type Auto switch model Air gripper model MRHQ D-M9V/M9WV D-M9/M9W Max. hysteresis (Max. value) Auto switch model O S O S O S O S O S 7 7 4 3 1 5 5 2 1 MHW2-20D MA D-M9(V)

R. Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW R Z 60 16 A R 2 J D C 21 B Bore size (mm) Number of auto switches Built-in magnet Cylinder stroke (mm) Nil Auto switch Nil No Nil S n 2 pcs. 1 pc. n pcs.

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 6 D-Y7BAL 5 5 5 5 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) In-line D-F9P D-F9N Perpendicular D-F9BV D-F9NV Perpendicular D-F9B Perpendicular D-F9PV Auto switch symbol In-line In-line Electrical entry 3-wire 2-wire Wiring method PNP NPN Output method IC circuit, Relay, PLC 24VDC relay, PLC Applicable load 5, 12, 24VDC (4.5 to 28VDC) Power supply 10mA or

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17