Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

CY1F

6 DC () Blue D-F9V Mounting screw M2.5 x 4l D-F9B, F9BV 4.3 Slotted set screw Indicator light 2 OUT (+) Brown Main switch circuit 20 2.7 2.8 4.6 OUT () Blue 3.8 3.1 6.2 4 Most sensitive position 6 18 2-Color Display Solid State Switches/Direct Mount Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Auto Switch Specifications Grommet D-F9W, D-F9WV (with Indicator light) Auto switch part no.

Air Slide Table Series MXQ

5 V,12 V 12 V Relay, PLC Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit Grommet Relay, PLC A93V A90V A93 A90 IC circuit 100 V 24 V 12 V 2-wire 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

CJ5-S

Note 2) A grease pack (GR-R-010, 10 g) is included in seal kits. 10-14-12 13 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic style (B): CG5BNS : With rubber bumper GA GB 2-Rc P H1 Width across flats B1 M BM (E1) D I I RE A B MM BZ B2 AL A K KA REC (F1) Plug bolt (4 pcs. included) C 0.1 8-J S + Stroke ZZ + Stroke H NA CX CY Bore size (mm) Stroke range A AL B1 B2 BM BZ C D E1 F1

CJ5-S

size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 RS H A R V Axial foot style (L): CJ5LS RZQ CA MI W S Rod cover side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB

Mechanically Jointed Rodless Cylinders

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

240

M9BA1 5 V, 12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC 24 V Yes Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 IC circuit 100 V 100 V or less Relay, PLC 2-wire 12 V

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

Bernoulli Gripper

VP Resin ZNCM PS 2 Stopper 20 V V V 30 V V V 40 V V 60 V V V 80 V V V VS Stainless steel Material Stopper size PN NBR (Black) PS Silicone rubber (White) Symbol Body size 1 20, 30 2 40, 60, 80 Table 2. Size 20 Piping (Refer to page 16 for details on how to mount the product.)

A_HEC-OM-K001

V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.

EXxx-OMQ0016

Signal name 1 24 V (Output) 2 0 V (Output) 3 24 V (Control and input) 4 0 V (Control and input) 5 F.E. (2)EX600-ED3Configuration Pin No.

CG5-S

B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10

Digital Pressure Switch

2.5% F.S. 0.6 to 5 V output 2 Voltage 2.5% F.S.

Air Slide Table/Long Stroke Type Series MXY

2-Color Display Solid State Auto Switch D-M9BW(V), D-M9NW(V), D-M9PW MXY (mm) B A Model Mounting Auto switch operating range MTS A B A B A B 50 3 MXY6 38 55 MXY8 3.5 43 63 MXY12 3 51 Adjust the auto switch after confirming the operating conditions in the actual setting.

Series MLGP

Minimum auto switch mounting stroke (mm) Bore size (mm) Auto switch Number of auto switch mounted 20 25 32 40 50 63 80 100 model 1 pc. 5 D-A9(V) D-M9(V) 2 pcs. 10 1 pc. 5 N o t e 2 ) D-M9W(V) D-M9AV 2 pcs 10 1 pc. 5 N o t e 2 ) D-M9A 2 pcs. 10 N o t e 2 ) 1 pc. 5 N o t e 1 ) 5 D-Z7/D-Z80 D-Y59/D-Y7P 2 pcs. 10 1 pc. 5 D-Y69 D-Y7PV 2 pcs. 5 1 pc. 5 N o t e 2 ) D-Y7W(V) D-Y7BA 2 pcs. 10 N o

Air Slide Table

Brown Brown Load Load Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC Internal voltage drop in auto switch is 4 V.

125

Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Circuit Diagram with Light AC circuit DC circuit Caution When making connections, take note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure

Possible to transfer a workpiece at low-speed.

2-wire 5 V, 12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

MY1

IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V