REGULATOR

Right to left 6 6 6 6 e Flow direction Nil Downward Y Upward f Handle Nil Name plate, pressure gauge MPa Z Name plate psi, Pressure gauge MPa / psi Pressure unit g Please refer to the catalog when you select the model. 6 5.

NAMUR

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

AR Series Modular Type Regulator

Name plate and caution plate for bowl in imperial units: MPa V V V V Z Note 5) Name plate and caution plate for bowl in imperial units: psi Note 6) Note 6) Note 6) Note 6) Note 2) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

VT325

screw 2 1 3 (2b) How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6.

IZN10_C

OFF HV LED ON/OFF OFF NDL LED OFF -19- 6. 6. 6. 6. ( ( ( ( ) ) ) ) IZN10-01/IZN10-02 / M3X0.5 4 () 2xM3x0.5 10 -20- 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. ! ( ( ( ( 2 2 2 2 ) ) ) ) LED , , , -21- 7 7 7 7-2. 2. 2. 2. 7-2-1. 7-2-2. 3-1 Assy Assy Assy LOCK ! -22-

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

(Refer to pages 15-6-3 and 15-6-5 for details.)

VT307

Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm Type D: 6 to 8 mm Applicable crimp terminal Type E/T: 1.25-3, 1.25-3S 1.25Y-3N, 1.25Y-3S Round or Y shaped crimped terminals can be not used for type D.

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

HRL

Standards RS-232C One thermo-chiller for one master RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 Master This product Do not connect with other pins. 5 9 6 1 D-sub 9-pin female (socket) type 334 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Optional Accessories Consumables List Part no. Description Qty.

VZ3000

x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200 100 Perpendicular, upward actuation

HRX-OM-X037

6.

FR Soft Nylon Tubing Series TRS Flame Resistant (Equivalent to UL-94 Standard V-0)

Grajski trg 15, SLO8360 Zuzemberk, Slovenia TEL: 07388-5240 FAX: 07388-5249 THAILAND SMC Thailand Ltd. 134/6 Moo 5, Tiwanon Road, Bangkadi, Amphur Muang, Patumthani 12000, Thailand TEL: 02-963-7099 FAX: 02-501-2937 INDIA SMC Pneumatics (India) Pvt. Ltd. D-107 to 112, Phase-2, Extension, Noida, Dist.

ISG

Grajski trg 15, SLO8360 Zuzemberk, Slovenia TEL: 07388-5240 FAX: 07388-5249 THAILAND SMC Thailand Ltd. 134/6 Moo 5, Tiwanon Road, Bangkadi, Amphur Muang, Patumthani 12000, Thailand TEL: 02-963-7099 FAX: 02-501-2937 INDIA SMC Pneumatics (India) Pvt. Ltd. D-107 to 112, Phase-2, Extension, Noida, Dist.

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

2-T1 L3 L2 L1 Model T1 T2 D L1 L2 L3 XTO-2571-02 Rc1/4 52 52 21 57 XTO-2571-03 Rc3/8 XTO-1239-02 Rc1/4 84 80 37 79 XTO-1239-03 Rc3/8 Rc1/4 XTO-1239-04 Rc1/2 XTO-1719-06 Rc3/4 98 98 40 90 XTO-1719-10 Rc1 !

CEx-OMQ0010

) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm

IZx-OMP0064

1840 2 1 2 940 3 1000 2 2 1960 2020 1 1 5 6 6 7 6 6 1 3 2 3 1060 1 1 2 1180 1 3 2080 2140 2 4 2 5 1240 4 1360 1 1 3 1 1 2200 2260 2 1 1 7 2 7 1420 1 4 1480 1 4 2380 2440 8 7 AC adapter AC adapter for IZS40 Note) AC cord is only for use in Japan.

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.