3 5 22 22 14 14 1 1 2-Rc3/8 Ports R1, R2 Rc1/4, 3/8 Port P 25 25 2-Rc3/8 Ports R1, R2 25 25 Rc1/8 Port X (PE) Rc1/8 Port X (PE) Rc1/4, 3/8 Port P 3 Series VQ7-6 Prewired Connector Type 2 position/Single : VQ7-6-FG-SSC Single (reverse pressure): VQ7-6-YZ-SSC 68.5 120.5 52 120.5 2-6.5 Mounting hole 50 50 68.5 25 25 42.5 42.5 2-Rc3/8 (R1, R2) 13 (port A) 13 (port B) Manual override R1 R2 P A
-11 32.6 52 49.4 3/8" 12 20.9 17.9 19.4 105 25.8 16.2 104 21 26.8 NPT 1/2 57.6 50.1 49.6 42.1 29 23.8 58 AS431FG-N04-13 36.3 52 1/2" 21.7 26.8 19.4 106 22 Reference dimensions for M5 x 0.8 and R(PT) threads after installation.
4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter AFF/AM/AMD Series Dimensions: AFF, AM, AMD H Bracket K L N O J M D C I E P Bracket (Accessory) F B OUT IN Option H: Auto drain (1.6 MPa) Flange drop prevention stopper (Do not apply force when removing
and M12 connector Bracket J Analogue 1 to 5V K Analogue 4 to 20mA Nil Yes 1 2 Yes Yes 3 Yes Thread type Port size Symbol Content Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F G 4 1/2 Yes 6 3/4 Yes 8 1 Yes -11No.LFE*-OMZ0012 Combination of options Options available Without Lead wire and M12 connector With Lead wire and M12 connector No Bracket Yes Accessories/ Part number
25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246 267 291 221
port 2 2 3-0.02 0 3-0.02 0 8-0.05 0 +0.02 3 x 3 0 depth 6 (A, B, C common view) Open: 16, Closed: 10 12 12 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 4 4 4 4 With Auto Switch: MDHR2-10R 11223 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) MDHR2-10E port location 112233.4 B 32 36 120 120 D A 32 +0.02 2 x 3 0 depth 6 9.5 Finger closing port Finger opening port M3 x
75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63
10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6
rate values are measured at 0.5 MPa and 20C. 15-9-100 10 Tamper Proof Dual Speed Controller with One-touch Fitting How to Order ASD 3 3 0 F 0106 S T Body size Tamper proof Note) Speed controller requires a special tool for flow adjustment.
Controlled flow (Free flow) Effective area (mm2) Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-84 11 Dual Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting How to Order ASD 3 3 0 F 0106 S D Body size Type adjustable by a flat head screwdriver 2 3 4 5 6 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard With seal Note) In case that connecting
VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.
Operation Examples and Procedures. 51 12.1 Return to origin example . 51 12.2 Positioning operation example. 52 3 - 12.3 Pushing operation example . 53 13.
8 50.9 32.5 35.7 42.2 17 -04MS R 1/2 57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.
5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.
5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !
8 50.9 32.5 35.7 42.2 17 -04MS R 1/2 57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.
(1.8) 14.8 (0.8) 36 (2) 15.3 (0.85) 02 03 VFA5144 2 position single : 0.51 02 03 04: 0.56 34.2 (1.9) 34.2 (1.9) 33 (1.8) 36 (2) 45 (2.5) 52 (2.9) 02 03 04 1 8 3 8 1 2 1 4 , , : 0.52 02 03 04: 0.57 1 8 45 (2.5) 52 (2.9) VFA5244 2 position double 02 03 04 3 8 1 2 1 4 , , Body ported : 0.66 02 03 04: 0.71 VFA5344 -X1 3 position closed center 1 8 34 (1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2
Refer to page 30 and 31 for detailed selection procedures. 3 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 2 CY1F/M2 1 CY1F/M1 3 CY1F/M3 30 30 30 CY1F25 20 20 20 CY1F25 CY1F25 10 10 10 5 5 5 Moment Nm Moment Nm Moment Nm 4 4 4 CY1F15 3 3 3 CY1F10 2 2 2 CY1F15 CY1F15 CY1F10 CY1F10 1 1 1 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston