PSxx-OMV0003CN

000) /(59) [FAL] 3[nG] SET1 -47No.PS-OMV0003CN-G UP DOWN /(59 ) SET 1 () UP DOWN SET [F81] 30 -48No.PS-OMV0003CN-G [F90] <> UPDOWN[F90] SET UP DOWN [on] [oFF]() SET [oFF]() SET [F90] SET 50 UP DOWN SET2 -49No.PS-OMV0003CN-G 1 2 PNP/NPN 3 4 OUT1 5 OUT1 6 OUT1 7 OUT1 8 OUT1 ON 9 OUT1 OFF 10 11 OUT2 12 OUT2 13 OUT2 14 OUT2 15 OUT2 ON 16 OUT2 OFF 17 18 19 20 21 22

VFS4000-OMY0001

A A B B 1.25-3.5M1.25Y-3L1.25Y-3M COMCOMCOM COMVFS300040005000 AZ683-56A 20VFS4000500010 0.6Nm /01C COM AB VVFS2000-30A-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Ports: 4P [4 Ports (1-In; 2-Out; 4-Gauge Port In; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 4 [0 to 400 psig (0 to 3 MPa)], Gauge Port, Inlet: 1 [-30 in.Hg to 100

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Referential tightening torque: 2.2 Nm 400 Series AF10 to 60 Replacement Procedure of Element 2 Procedure Tools Check item Process Applicable model Disassembly 1) Remove the bowl assembly. Push the bowl assembly lock button. Lifting the bowl assembly, rotate the assembly 45 degree (right or left) to pull out the assembly. Actuators Modular F.R.L.

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Range Options: Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port Inlet; 4-Gauge Port Outlet)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet:

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port Inlet; 4-Gauge Port

Material: SHP (Body: 316L SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: Q [25 μin. (0.62 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: 4 [0 to 400 psig (0 to 3 MPa)], Gauge Port, Outlet

-- NCM seies

Low temperature down to -22"F. . Double acting only 250 PSt {r 7.5 8 PSI -22158.F (-30 2-20 inch/sec Double None FroDt nr HOW TO ORDER Stod( Stroke Ust rcu@f Ex.) NCMB 075-0400-XB7 ---E-Low tgmperatule Alto-switch capable not avaitable.

FSQ seies

q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

Rotary Cylinder Series MRQ Size: 32, 40 1

Rotary motion theoretical output Graph (1) Cylinder Output on the Extending Side (Double acting) (Nm) Operating pressure (MPa) Size 150 1500 0.15 0.3 0.3 0.4 0.5 0.6 0.7 Tube bore size [mm] 100 1000 32 40 0.34 0.45 0.68 0.90 1.13 1.36 1.58 40 0.64 0.85 1.27 1.70 2.12 2.54 2.97 40 50 400 500 Graph of Effective Output 32 CRB2 3 20 25 30 200 250 300 Operating pressure [MPa] Cylinder output F

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR ITV IC ITVX Recommended Tightening Torque PVQ Unit: Nm Connection thread 1/2 3/8 1/4 1/8 VEF VEP Torque 28 to 30 22 to 24 12 to 14 7 to 9 VER 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF ITV IC ITVH Recommended Tightening Torque ITVX Unit: Nm Connection thread 1/2 3/8 1/4 1/8 PVQ Torque 28 to 30 22 to 24 12 to 14 7 to 9 VY1 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

CE

No.CE*-OMI0063-C / / CE1* Series 1. 16 2. 7 2-1. 7 2-2. 78 2-2-1. 7 2-2-2. 8 2-2-3. 8 2-3. 9 3. 3-1. 10 3-2. 10 3-3. 11 3-3-1. 11 3-3-2. 11 3-3-3. 11 4. 4-1. 12 4-2. 12 4-3. 12 5. 5-1. 13 5-2. 14 5-3. 14 6. 6-1. 1516 6-2. 16 CE1B12 17 CE1B20 18 CE1B32 19 CE1B40 20 CE1B50 21 CE1B63 22 CE1 Series/ 1. 1) (ISO/IEC)(JIS) 2) *1) ISO

MHS

16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400

MHL2

400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

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