Free Mount Cylinder for Vacuum Series ZCUK

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Yes Yes Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12 V Reed switch Solid state

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110 VFS5100 1 2 3 4 0.88 Single 600 45 or less 2 position 3 position 3 8 Double VFS5210 VFS5200 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.06 600 25 or less Closed center VFS5310

SX

ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 114 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type

KC

(mm) Connection thread KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 14.7 14.7 15 14.2 13.7 13 15 17 21 23 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 18 19 21.5 24 25.5 2.6 32 36 42 79 105 17 17 19 22 24 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 Applicable tubing 6.8 13.1 20.4 30.4 Straight Union: KCH Applicable tubing O.D.

Electric Actuator

(Terminal no.) (16.6) (23.7) Cable length (L) [m] 1 3 5 8 A B C Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1.5 3 5 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B 10 (18) 15 (14.7) 15 16 (30.7) (1 1) L Connector B 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Connector B terminal no.

HRX-OM-X037

3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation and wiring of power supply cable

HRX-OM-S004

wiring . 3-11 3.3.3 Preparation and wiring of power supply cable . 3-13 3.3.4 Contact input/output communicatin wiring . 3-18 3.3.5 Wiring of run/stop signal inputRemote signal input . 3-19 3.3.6 Wiring of external switch signal input . 3-21 3.3.7 Wiring of contact output signal . 3-25 3.3.8 RS-485 communication wiring . 3-26 HRS Series HRX-OM-S004 Contents 3.3.9 RS-232C communication wiring

Fieldbus System

One-touch fitting (Metric) 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C./N.C.) 4-position dual 3-port valve (N.O./N.O.) 4-position dual 3-port valve (N.C.

HRX-OM-W032

Fig. 3-11 Wiring of the external switch (PNP open collector output) (example) HRS Series 3.3 Installation 3-21 HRX-OM-W032 Chapter 3 Transport and Setting Up Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.21 Communication Function.

PFxx-OMJ0005CN

1. 2. 3. 4

Compact Cylinder

D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5 100 59 Minimum Stroke for Auto Switch Mounting Operating Range [mm] [mm] Number of auto switches D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW

EXxx-OMY0004

/PL Input Connection to the F connectors Single-channel sensor or redundant sensor Two-channel redundant controlling device/sensor Input signal Equivalent Non-equivalent Cross-circuit detection With Without With Without With Without Sensor: Contact type Yes Yes Yes Yes Yes Yes Sensor: OSSD output type No Yes No Yes No No SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 Achievable safety requirement

HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-R005

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-O021

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-Z002

2.1.4 HRLE090-W-20/40-(In case of Water-cooled refrigeration) . 2-4 2.2 FUNCTION OF EACH PART . 2-5 2.3 OPERATION PANEL . 2-5 Chapter 3 Transport and Set Up . 3-1 3.1 TRANSPORT . 3-1 3.1.1 Transportation using a forklift and slinging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 INSTALLATION . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-5 3.2.3 Installation and maintenance space .

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Static moment 3.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VP4 21 21 Rc(PT)1/4, 3/8 M5 X 0.8 External pilot port (Only external pilot style(R)) (Rc(PT)3/8) (Rc(PT)3/8) P port 33 VQ 3 4 5 L plug connector (L): VQZ3 5 (R)lLl 0 1 02 03 3 4 5 DIN connector (Y): VQZ3 5 (R)lYl 0 1 02 03 VQ4 VQZ Indicator light 155.5<157.5> 300 VQD (Lead wire length) 71<72> VZS Pg.7 VFS MAX.10 163.5 56.5<60> 75 Applicable cord O.D. 3.5 to 7 VS Indicator light Cover diameter

New

40 48 62 66 1/4, 3/8 1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) Bracket mounting a b e f g h i j 56 56 70.5 70.5 Port size P Model a1Note) d 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3 6.5 6.5 6.5 6.5 10.5 10.5 10.5 10.5 31