7

(for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

2-Color Display Digital Flow Switch Series PFM

(with no condensation) Withstand voltage 1000 VAC for 1 min. between external terminal and case 50 M or more (500 VDC Mega) between external terminal and case Insulation resistance Without orifice: 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

LEH_C

6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

JXCx-OMT0028CN

100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

Compact Guide Cylinder Series MGQ

11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.

LG1H

Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 15 20 25 30 1000 1000 930 740 600 500 Model Note LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible

LEJ-OM002xx

(Manufacturable stroke range: LEJS63-M/ 790 to 1790mm) Note13) The return to origin of stopper type can not be used. 15 - Product Weight Series LEJS40 Stroke [mm] 200 300 400 500 600 700 800 900 1000 1200 Weight (kg) 5.6 6.4 7.1 7.9 8.7 9.4 10.2 11.0 11.7 13.3 Extra weight of lock (kg) S2:0.2 / S6:0.3 / T6:0.2 Series LEJS63 Stroke [mm] 300 400 500 600 700 800 900 1000 1200 1500 Weight (kg

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Refrigerated Thermo-chiller

FLT Temperature of the circulating fluid has exceeded the limitation set by customer. 11 Continue Reservoir High Temp.

Fieldbus system EtherCAT compatible SI Unit

(No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and F.E. Insulation resistance 500 VDC, 10 M min. between external terminals and F.E.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

11 13 13 8.5 9.5 9.5 11 14 5 8.5 9 10 10 6 6 6.5 8.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Precautions 1

Refer to front matters 42 and 43 for Safety Instructions, pages 3 to 11 for Actuator and Auto Switch Precautions and 3/4/5 Port Solenoid Valve Precautions in Best Pneumatics No. 1.

2/3 Port Valve

Refer to p.4.0-11 "Applicable Fluid Check List".

Digital Pressure Switch

Pa 0.525 525 5.25 0.076 0.155 3.94 2.11 53.5 X577 1 kPa 1.050 1050 10.50 0.152 0.310 7.88 4.22 107.1 X578 2 kPa 2.10 -1998 to 2100 21.0 0.305 0.620 15.8 8.43 214 X579 5 kPa 5.25 52.5 0.761 1.55 39.4 21.1 535 X580 10 kPa 10.50 105.0 1.52 31.0 78.8 42.2 1071 -: No units for display Analogue output Voltage output Current output Range Rated pressure range A B C X576 500 Pa -500 Pa 0 Pa 500 Pa