11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

SYJ72R is only for manifold use. 35 Series SYJ700 Construction c f a e b d N.C. N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A B A B A FREE LOCK 1-3-11 12 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

ML1C

Applicable bore A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 1114 A Hy-rodless Cylinder ML1C Series Construction #9 %7 #8 #7 %6 !0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Hand Valve Series VH 1

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

PFxx-OMO0004CN

fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

25

2 12 PA Mount with this surface up FLUID OUT Rc, NPT, G 1/8 PA(P) 84 72 60 41 7.5 45 PAX PB PB 2 x 4.5 Mounting hole Manual override pin PAF 66 16 PA PB Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated

CEx-OMG0106

Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

3-Position Rotary Table

No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 Description Body Cover Plate Seal Piston Pinion Gasket (for cover) Table Bearing retainer End cover A End cover B Cylinder tube A Cylinder tube B Tube cover A Tube cover B Sub piston R Sub piston F Adjustment bolt R Adjustment bolt F Magnet Wear ring Bearing Material Aluminum alloy Aluminum alloy Aluminum alloy NBR Stainless steel

LECA6_C

B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

Magnetically Coupled Rodless Cylinder

B Counter bore depth C T Y HT 2-P (Piping port) L 0 -0.1 22 HP 8 TC X F WP 12.5 19.5 D GW 7 GP QW PW 4-LD Plug 2 x 4-MM Thread depth M Switch rail HS W K Plug CY3RG15 CR HR G G Q + Stroke Z + Stroke CY3RG25, 32, 40 CY3RG20 (mm) Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 B 8 9.5 9.5 11 11 HP 11 14.5 20 25 HR 30 36 41

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C T Y HT 2-P (Piping port) L 0 -0.1 22 HP 8 TC X F WP 12.5 19.5 D GW 7 GP QW PW 4-LD Plug 2 x 4-MM Thread depth M Switch rail HS W K Plug CY3RG15 CR HR G G Q + Stroke Z + Stroke CY3RG25, 32, 40 CY3RG20 (mm) Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 B 8 9.5 9.5 11 11 HP 11 14.5 20 25 HR 30 36 41

Series 10-, 21- AW-B Filter Regulator

F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6

ZK2-C

/ON/OFF H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPaH_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 H_3 ,P_1 H_3 100 -43NO.ZK2-OM00801-B , (1015 ) -44NO.ZK2-OM00801-B ZK2-ZSV-A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -45NO.ZK2-OM00801-B No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 A No.15 -46NO.ZK2-OM00801-B No.

RZQ

24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD

Heavy Duty Stopper Cylinder

FT GA 2 x P D QA Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) 2 x P QB W WB E GB A (mm) Circumscribed circle O QA Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 26 9 14 depth 5 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 31 11 18

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05