Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

MHY2/MHW2

A part z1 m1 = 40 X 7 X 8 X 2.7 X 10-6 Calculation of weight m1 = a X b X c X Specific gravity = 0.006(kg) Iz1 = {0.006 X (40 2+7 2)/12} X 10-6 Moment of inertia around Z1 axis = 0.8 X 10-6 (kgm 2) = 0.8 X 10-6+ 0.006 X 37 2 X 10-6 Iz1 = {m1(a 2+ b 2)/12} X 10-6 IA = 9.0 X 10-6(kgm 2) Moment of inertia around Z axis IA = IZ1 + m1r1 2 X 10-6 z r2 Z2 B part r2 = 47(mm) m2 = 5 X 10 X 12 X

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Features 2 Precision Air Slide Table Series MXP 6, 10, 12, 16 How to Order MXP 12 15 F9N S Precision Air Slide Table Cylinder bore size Standard stroke (mm) Number of auto switches 5, 10 6 2 pcs. Nil 10, 20 10 S 1 pc. 15, 25 12 n "n" pcs. MXP6-5 with two auto switches applies to models D-F9 and D-F9V only. In case of other auto switches, only 1 pc.

Electric Actuator

Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A 100 to 600 18 5 6 to 250 6 Series LECP6 Series LECP1 Series LECPA

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Accessory specification With pressure gauge With auto drain Bracket mounting size Model Port size B C D A T 29.5 28.5 30.5 35 35 U P 2.5 13 10 12 12 Q 65 64

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

12 20.9 Reference dimensions of M5 x 0.8, R threads after installation.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20

CLQ

(unlocks when pressurized) Rod end male threads H1 Rod end nut H2 X C1 L1 (mm) Stroke range Without auto switch With auto switch Bore size (mm) A G E H I K L M Q S U VH VV W D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 36 42 39.2 43.2 21.2 23.2 9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 502 Series MHR2/MDHR2 Rotary Actuated Air Gripper 2-Finger Type With auto switch (Built-in magnet) : MDHR2-30R 76 73 B 3 x M5 x 0.8 thread depth 10 MDHR2-30E Port Location P.C.D.43 (Mounting thread) 80 120 120 15.5 A C 54 M5 x 0.8 M5 x 0.8

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

Compact Cylinder with Lock Series CLQ

(unlocks when pressurized) Rod end male threads H1 Rod end nut H2 X C1 L1 (mm) Stroke range Without auto switch With auto switch Bore size (mm) A G E H I K L M Q S U VH VV W D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 36 42 39.2 43.2 21.2 23.2 9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end