2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC
W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100
20 0.1 0.1 10 10 Return port Return port 0 0 0.0 0.0 0 10 20 0 10 20 30 Pressure [MPa] Pressure [MPa] Lifting height [m] Lifting height [m] Circulating fluid flow (l/min) Circulating fluid flow (l/min) HRG005(After mounting HRG-BP005) 0.5 50 Outlet port: 60 [Hz] 0.4 40 Outlet port: 50 [Hz] 0.3 30 Return port: 60 [Hz] 0.2 20 Return port: 50 [Hz] 0.1 10 0 0.0 0 20 10 40 30 Pressure [MPa] Lifting
(mm) 50 0 70 53 20 50 0.062 62 23 10 16 80 35 32 63 0 55 0.074 20 58 80 60 10 16 80 23 35 32 80 0 75 25 61 95 65 0.074 90 23 10 20 37 40 100 0 63 116 90 30 80 0.074 20 95 25 10 40 37 H1 J JC K KA MM NE NF S P WH ZZ Bore size (mm) 50 M10 x 1.5 thread depth 20 M18 x 1.5 1/2 6.8 to 11.3 305 25 27 215 75 7 18 11 63 M10 x 1.5 thread depth 20 M18 x 1.5 24.5 27 1/2 215 305 18 11 75 7 80 M12 x 1.75
Please See Below for How to Order Piston Rod Assembly JM-10 JM-045 JM-045 JM-10 20 Jam Nut Carbon steel * Components included in a seal kit.
Example: SS3YJ3-20-03 .1 pc. (Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.
Female thread One-Touch fitting Pad diameter (mm) M5 x 0.8 Rc(PT)1/8 4 tube 6 tube 8 tube 30 32 33 10 to 16 128 133 139 20 to 32 158 159 167 40, 50 (g) Additional Weight by Stroke Pad diameter (mm) Stroke (mm) 20 30 40 50 10 to 16 +10.5 +12.5 +22.5 +24 20 to 50 +37.5 +40 +66.5 6 Series ZPT ZPT 10/13/16 F J/K 10-B5-A10 (With Buffer/Female Thread) ZPT 20/25/32 F J/K 10-B01-A14 (With
40 30 20 300 200 100 10 Usable range 20 30 40 50 Usable range 5 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B CY3R CY3B CY3R CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) CY1S 100 500 400 50 300 30 200 CY1L 100 10 20 30 40 50 Usable range
40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.
+0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.
VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.
This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.
This control is not for synchronizing the position of the main axis and slave axis. 10 10 Current position Current position Origin 0 0 Origin 10 20 30 40 50 Axis 1 10 20 30 40 50 Axis 1 For 3 Axes JXC92 Series For 4 Axes JXC73/83/93 Series VParallel I/O/ V Type V Width: Approx. 38% reduction Type V Width: Approx. 18% reduction 78 47 mm shorter 140 30 mm shorter JXC92 JXC73/83 170 125 *
5/16-24 A 0.75 0.75 1.25 AA 1.00 1.25 1.75 B 0.625 0.750 1.00 CA 0.093 0.093 0.125 D 0.22 0.25 0.38 DD 10-32 UNF 10-32 UNF 1/4-20 UNC E 0.81 1.12 1.56 EA 1.00 1.25 1.75 EE 1/8 1/8 1/4 NA 1.12 1.47 1.93 NE 0.12 0.24 0.25 NH 10-32 UNF 10-32 UNF 1/4-20 UNC NT 1/4-20 1/4-20 5/16-18 TN 0.62 0.81 1.12 WF 0.34 0.47 0.38 YE 0.88 1.22 1.57 XA 0.38 0.62 0.88 Bore size (inch) 075 (3/4") 106 (1-1/16
VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.
20 20 ZMA Suction flow rate 10 10 10 ZQ Flow characteristics are expressed in ejector vacuum pressure and suction flow.
0.4MPa 0.5MPa 0.6MPa 40 20 20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L mm Holding point L mm Holding point L mm Holding point L mm Note) Distance to the holding point L of single acting type is shorten by spring return.