F

/4 KQT23-02S 14 9.6 10 17.5 25.5 24.5 15.5 3.4 2.9 20 4 M5x0.8 KQT04-M5 8 10.4 8 18 15.5 17 16 4.3 4.3 6 4 1/8 KQT04-01S 10 10.4 10 18 22 23 16 6.0 6.0 13 4 1/4 KQT04-02S 14 10.4 10 18 26 25 16 6.0 6.0 19 6 M5x0.8 KQT06-M5 8 12.8 8 20 16 18 17 4.3 4.3 8 6 1/8 KQT06-01S 10 12.8 10 20 23 25.5 17 13.9 13.9 13 6 1/4 KQT06-02S 14 12.8 10 20 27 27.5 17 13.9 13.9 21 6 3/8 KQT06-03S 17 12.8 10 20

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

Free Mount Cylinder Series CU

) 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.

Magnetically Coupled Rodless Cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

High Purity Chemical Valve

2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.

Soft Start-up Valve

SI units: MPa Z Name plate and pressure gauge in imperial units: psi *1 *1 *1 *1 *1 Only for the NPT thread -18- AV L 20 00 02 B A Manual operation AV L 20 00 02 B 1 D A with solenoid valve Lockout type Symbol Description Body size 20 30 40 50 NIL Rc Thread type N NPT F G 02 1/4 03 3/8 Port size 04 1/2 1(P), 2(A) 06 3/4 10 1 a Mounting NIL Without mounting option B With bracket Option b

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

V

R 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 M O U N T I N G T H R E A D P A D T Y P E Symbol Thread Dia 2~8 10~16 40~50 20~32 U Flat C Flat with Rib (Not 2,4,6,8) D Deep (10,16,25,40) B Bellows (Not 2,4) A5 M5X0.8 Male Thread A6 M6X1 A8 M8X1 V A C U U M E N T R Y Symbol Port Size 2~8 10~16 40~50 20~32 P A D M AT E R I A L 04 4 tube OneTouch Tube Fitting N Nitrile

modular-press-e

-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N

Modular F.R.L. Pressure Control Equipment

-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N

Compact Hydraulic Cylinder

H G A B C D E F I Size Tolerance AD-FI-20 AD-FI-25 AD-FI-32 AD-CHN-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 20 25 32 40 46 46 56 64 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 28 30 40 43 10 10 13 13 6.5 6.5 10 10 5.5 5.5 9 9 CHQ Y-type double knuckle joint M R J K L CHKm Note Part no. 20: Y-02 25: Y-03 32: Y-04C 40: YHN-04 AD-FI-20 AD-FI-25 AD-FI-32 AD-CHN-40 M4 M4 M5 M5 12

Modular Type Regulators Series AR

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Option Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30 AR 25

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

to +60 (4 to +140) 5 to +50 (+23 to +122) 8-6: 20; 8-8: 15, 8-10: 10 8-6: 5; 8-8: 5, 8-10: 5 Max. operating frequency (cycle/sec) 8-6: 10; 8-8: 10, 8-10: 20 8-6: 3; 8-8: 3, 8-10: 2 Lubrication Not required Manual override Non-locking push type Enclosure Dusttight Coil rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 24 VDC Allowable voltage range (%) 15 to +10% of rated voltage Coil insulation

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Refer to p.2.10-37 for DIN rail model number C Connector Stations Port size{2(A)Port} 2 stations 02 VQZ200 VQZ300 Port size Symbol 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 Rc(PT)1/8 Rc(PT)1/4 Mixture port C4 C6 C8 C10 01 02 CM(1) Note 1) Specify port mixture/with port plug by means of manifold specification sheet.

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.