CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

180

10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 703 180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2 16 2 D M9BW Made to Order Refer to page 705 for details.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

1.0 1.1 2.2 1.3 2.5 4.6 3.2 MY2H MTS For 100 mm stroke cylinder MY CY1H Available bore sizes 10, 15, 25 CY CY1H CY1F MG Standard stroke (mm) Maximum stroke Cushion Piping directions Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28 34 46 46 63 198 225 205 294 260 DBuilt-in shock absorber 39.5 CY1F 15 750 Concentrated piping on left -X 25 1200 Overall length reduced by 22% compared to Series MY2H 20Magnetically coupled rodless

MHY2/MHW2

2.7 X 10-6 Calculation of weight m2 = d X e X f X Specific gravity = 0.002(kg) Iz2 = {0.002 X (52 + 102)/12} X 10-6 Moment of inertia around Z2 axis = 0.02 X 10-6 (kgm 2) IB = 0.02 X 10-6 + 0.002 X 472 X 10-6 Iz2 = {m2(d 2 + e2)/12} x 10-6 Moment of inertia around Z axis IB = IZ2 + m2r22 x 10-6 = 4.4 X 10-6 (kgm2) I = 9.0 X 10-6 + 4.4 X 10-6 Total moment of inertia I = IA + IB = 13.4 X

0.55

Since voltage drops due to the internal circuit in S, Z, T types (with power saving circuit), the allowable voltage fluctuation should be within the following range. 24 VDC: 7% to +10% 12 VDC: 4% to +10% Made to Order (Refer to page 24 for details.)

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-01 847 Series PSE300 Specifications Model PSE3 PSE533 PSE543 PSE563 PSE531 PSE541 PSE561 PSE532 PSE530 PSE560 PSE564 PSE550 Applicable pressure sensor Set (differential) pressure range Setting/Display resolution Pressure range Note 1) 0.2 to 2 kPa 0.01 kPa 50 to 500 kPa 1 kPa 0.1 to 1 MPa 0.001 MPa 10 to 100 kPa 0.1 kPa For low pressure 0 to 100 kPa 10 to 0 kPa 10 to 101 kPa 0.1 kPa

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.1 0.1 0 0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

VZS

79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 17 361 370 18 381 390 19 401 410 20 421 430 21 441 450 22 461 470 23 481 490 24 501 510 L1 L2 3-7-34 35 5 Port Pilot Operated

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

10

Symbol O.D. thread size Stroke 0805 1006 1410 8 mm 5 mm 2 pcs. 1 pc. 10 mm 6 mm 3 pcs. 1 pc. 14 mm 10 mm 1 pc.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features

VCL

(mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L