Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQP2 Double acting 7-6-88 Spring return/ 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 Spring extend CQP2 7-6-98 Large Bore Size 125, 140 160, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S

Compact Rotary Actuator Series CRQ2

CRJ 400 CRA1 Displacement (m) Displacement (m) CRQ2 MSQ 250 MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

pressure range 1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) Leakage Maximum baking temperature 150C Ambient and fluid temperature 10 to 60C Piston speed 50 to 300 mm/s Stroke adjustment 2 to 0 mm on each side (4 to 0 mm total) Cushion Sine cushion (Air cushion) Port size 5/16-24 UNF 7/16-20 UNF Vacuum grease for linear guide unit and inside the cylinder

Low Friction Cylinders Series MQ

39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8) 29 5.5 38 4 5 5 8 20 3.5 6.5 14.5 7 16 44 M4 x 0.7 M6 x 1.0 10 to 60 34 8 8 ( 7.8) 36 5.5 47 7 5 7 10 25.5 5.4 9 18 10 20 47.5 M5 x 0.8 M6 x 1.0 10 to 60 37.5 10 10 ( 9.8) 40 5.5 52 7 6 8 10 28 5.4 9 19.5 10 25 10 to 50, 75, 100 54 M6 x 1.0 M6 x 1.0 42 12 12 (11.8) 45 8.5 Rc 1/8 NPT 1/8 G 1/8 49.5 60 7 7 4.5 10 12 34 5.5 9 23 10 30 10

MQQ

D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x

MQQ

5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5 M6 x 1.0 84.5 12 12 45 13.5 M6 x 1.0 60 4.5 10 12 34 5.5 9 58 10 49.5 7 7 28 10 to 50, 75, 100 116 M8 x 1.25 104 13 16 52 17.5 M6 x 1.0 69 5 14 12 40 5.5 9 71 10 57 10 7 With rod end male thread: MQQDM

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

11.5 For latching solenoid or AC solenoid 43.5 300 U side D side Stations 5 4 3 2 1 n 300 42.2 36.3 16.4 12.5 A A 7.5 n-M5 A port Dimensions Equation/ L1=10n+13, L2=10n+7, n:Stations (Max.20 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 23 33 43 53 63 73 83 93 103 113 123 133 143 153 163 173 183 193 203 213 L2 17 27 37 47 57 67 77 87 97 107 117 127 137 147 157 167 177

Rodless Cylinder for Vacuum Series CYV ø15, ø32

MTS Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa. CY Note 3) This data is considered typical but not guaranteed. 10-9 MG Leakage test result CX 10-10 0 5 10 DTime [min] -X e e a a l l k k w w a a 2 o o g g 1 O-ring seals separate vacuum and atmosphere.

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

3 Position Cylinder Series RZQ

Model RZQ32 RZQ40,50 RZQ63 Applicable floating joint JB40-8-125 Graph 1 JB63-10-150 200 JB80-16-200 63 100 Guide Shock absorber 50 Load weight (kg) 50 40 40 32 30 Floating joint 3 position cylinder 20 10 Maintenance Caution 5 150 100 200 300 1.

Air Slide Table Series MXP

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N

Step Motor Driver （ Pulse input type ）

10 10 10 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD ABS ABS ABS ABS ABS ABS Speed 280 420 280 420 280 420 Position 0.00 0.00 0.00 0.00

Electric Actuator with Integrated Guide Series LTF

type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

Gun Type Ionizer

1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200