High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 30 35 40 45 65 85 XLF Operating time ms Note 2) 30 35 60 60 100 130 XLFV Flange type KF (NW), K (

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

mm 005 500 mm 010 1000 mm 030 3000 mm 050 5000 mm 100 10 mm Straight connector type Angle connector type M12 M12 44.7 L 14.9 14.9 40.7 6 6 32.3 28.3 25.3 25.3 L M12 M12 Terminal no.

JXCx-OMY0006

Move the actuator from the origin to a point 100 mm away at 100 mm/s. (Step Data No.1 is used for this operation). From the 100 mm point, the actuator must start a pushing operation of 10 mm/s speed and 50% or less force. (the pushing distance is up to 5 mm).

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

Precautions 1

Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C A D-H7 D-H7C D-H7W D-H7NF Auto switch model D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL Bore size (mm) A A B B A B A B A B B A B 20 25 32 40 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after

JA/JAH/JB/JS

8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Pilot Operated

rectifier) AC (Class B coil/H coil) Note 2) Rated voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 230 VAC, 240 VAC, 48 VAC DC (Class B coil only) 24 VDC, 12 VDC 10% of rated voltage 10% or less of rated voltage 20% or less of rated voltage 2% or less of rated voltage Class B, Class H Coil specifications Allowable voltage fluctuation AC (Class B coil, with a full-wave rectifier) AC (Class B coil

Air Cylinder Series CS1

B B B B B B A A A A A A A Bore size 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for the auto switch mounting position at the stroke end

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

Basic Type/Direct Mount Type

40 30 20 300 200 100 10 Usable range 20 30 40 50 Usable range 5 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B CY3R CY3B CY3R CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) CY1S 100 500 400 50 300 30 200 CY1L 100 10 20 30 40 50 Usable range

7ND9071en

Error 0.1 % 8 Actuator Reversals 10 [>=0] 5 Setpoint at Error 66.1 % 9 Spool Total Travel 10 [>=0] Valve Analysis Test Key Figures: Spool Reversals 10 [>=0] Setpoint Reversals Trend 10 [>=0] 1 Target Position 50.0 % Steady State Dev. 3.0 % [0..100%] 2 Steady Time 12.0 sec. Dynamic State Dev. 20.0 % [0..100%] 3 Ramp Time 8.0 sec.

JXCx-OMT0005CN

m 6 m 39 m 250kbps 250 m 78 m 125kbps 500 m 156 m 100 m 121 1%(1/4 W) DeviceNet AWG18 (0.82 mm 2) AWG15 (1.65 mm 2) AWG24 (0.20 mm 2) AWG22 (0.33 mm 2) 120 10%(1 MHz) 120 10%(1 MHz) 1.36 ns/ft(max.) 1.36 ns/ft(max.) 0.13 db/100 ft@125 kHz(max.) 0.25 db/100 ft@500 kHz(max.) 0.36 db/100 ft@1 MHz(max.) 0.29 db/100 ft@125 kHz(max.) 0.50 db/100 ft@500 kHz(max.) 0.70 db/100 ft@1 MHz

ZPT/ZPX

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 10 40 40 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT100HB-A16 ZPT100HB-B12 M12 x 1.75 100 103 68.5 107 47.5 60.5 90.5 35.5 100 103.1 68.6 106.7 47.5 60.5 35.5 ZPT125HB-A16

SMC Pneumatic Clean Series

8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2 10-/1121-/22Cylinder with end lock/ 20, 25, 32, 40 (Head side lock) How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of

Air Slide Table Series MXW

) = 4/100 With shock absorber = 1/100 W: Mass (kg) V: Collision speed (mm/s) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 (mm) L2 B MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 V MXH Va: Average speed (mm/s) V MXU Selection Calculation MXS MXQ Cylinder: MXW16 Cushion: Standard (Urethane bumper) Mounting: Horizontal wall mounting Speed (Average): Va = 300 [mm/s] Mass:

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..

Table of Contents - Tubing

(Example) 10-TU0425W-20 TUB-6 Soft Polyurethane Tubing (Metric) How to Order Suitable for environments where extreme flexibility is required TUS 10 65 B 100 Length per roll Tube O.D. Symbol Length 20m 100m (Black and Blue only) 20 Tube I.D. 100 Longer lengths available upon request.

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0