10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

TF H TT TV 4TF TF+0.10 0 TV TX 20 25 32 40 38 8 29 14 11 10 5.5 25 3.2 (35.8) Up to 125 Z + Stroke TZ 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) Up to 200 ZZ + Stroke 54 12 40 20 15 10 6.6 35 4.5 (49.4) Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) Up to 200 Clevis style: CG1DN Z 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TW TX TY TZ Z ZZ Z ZZ Z ZZ ZZ CD hole H10 Axis

LJ1H

Nil B contact 2pcs. None Series H NPN, A contact 1pc.,B contact 2pcs. With IO connector Motor type 10 20 30 PNP, A contact 1pc. AC servo motor S2 PNP, B contact 2pcs. (Incremental encoder) 100 W PNP, A contact 1pc.,B contact 2pcs.

MGP

b a X 0.02 c d X 6H7 e 7 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB GB GA 2-Rc 3/8 Q 10 (Plug

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs.

7.5

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

VFR

-E, VFR631 -D(Z) 3 position exhaust center: VFR641 -E, VFR641 -D(Z) 3 position pressure center: VFR651 -E, VFR651 -D(Z) 0 1 0 1 0 1 0 1 0 1 0 1 Electrical entry (2-2.3) 196.5 234 184.5 117 93 A B 108 72 90 A B Manual override (Non-locking) P PE EA EB PE Light/Surge voltage suppressor (For DZ) Applicable cable O.D. 4-9 (Mounting hole) 170 186 6.8 to 10 Other dimensions are the same as the

EX120/121/122

& 2s Complements Data Format AD value AD value AD value 31208 (79E8) (79E8) 1950 (79E) (79E) 1934 (78E) (78E) a Input 0 b 114 (72) (72) 31208 (F9E8) (8618) Input 0 Input 0 a a b Input signal range a 0 to 10 V Input signal range a b 1 to 5 V Input signal range a b 10 to 10 V 10 V 1 V 5 V 10 V 10 V 0 to 5 V 5 V 4 to 20 mA 4 mA 20 mA 5 to 5 V 5 V 5 V 0 to 20 mA 20 mA 20 to 20 mA 20 mA 20 mA

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

NCQ8

NCDQ8A(B)Z-(C)(M) (in) NCDQ8A(B)Z-T(M) (025st to 100st) (in) D-A9, D-A9V D-M9(V), D-M9W(V) D-A9, D-A9V D-M9(V), D-M9W(V) D-F9BAL D-F9BAL Bore size Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 300 400 056 075 106 150 200 250 0.24 0.14 0.33 0.31 0.2 0.35 0.37 0.49 0.04 0.08 0.12 0.12 0.2 0.28 0.34 0.53 0.71 0.81 0.96 1.18 1.45 1.6 1.94 2.44 0.39 0.3 0.49 0.47

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Position (Detection at stroke end) and Its Mounting Height CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX (mm) Auto Switch Proper Mounting Position Auto switch model Band mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-H7m D-H7C D-H7NF D-H7mW D-H7BA D-C7m D-C80 D-C73C D-C80C D-A9m D-A9mV A B A B A B A B Bore size 10 (5) 6 (5) 6 (1) 2 (1) 2 2.5 2.5 1.5

Compact Rotary Actuator Series CRQ2

Rotation starting point End of rotation R e 10 g ot 10 n at ra L io n B Rotation starting point End of rotation n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 A A R e o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 The figure shows the view from

REA/REB

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

REA/REB

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

Single Axis Electric Actuator Series LJ1H

143 Deflection Data 145 Part Number Designations 100 F N 1 1 B G LJ1 10 H W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Cable entry direction None B contact specification 2 pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When rod end female thread is used, use a thin wrench when tightening the piston rod. 712 Series CM2R-Z 10-/1121-/2220, 25, 32, 40 Direct Mount Cylinder RoHS How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 F Z M9BW 21 C D M 2 R A 40 150 F Z M9BW Mounting Number of auto switches Rod end thread A B Bottom Front Nil S n 2 pcs. 1 pc. n pcs.

Combination Cylinder

CB Rear flange With rod boot CV/MVG Without rod boot Bore (mm) ZZ 202 220 223 247 ZZ 182 198 201 227 CXW 20 25 32 40 CXS Front trunnion/CLG1UN Front trunnion CXT With rod boot Without rod boot Bore (mm) TT BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z 46 51 51 62 MX Z 66 73 73 82 20 25 32 40 0.025 0.047 8 10 10 10 10 28 28 28 30 5.5 5.5 6.6 6.6 51 26 28 28 36 69.5 31 40 47 47 54 3.2 3.2 4.5 4.5

MG

WB J JA 10 Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FB FA S K E G With head end lock 7 6H7 HN 10 5 6H7 DM 23 b a Detailed figure of section XX T-slot dimensions e c d End lock mechanism (Manual release lock type) 30 Bore size (mm) e d c a b With rod end lock 80 22.5 8 12 13.3 20.3 100 30 10 13.5 15.3 23.3 Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB