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30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

V100

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

5-Port Solenoid Valve

2 Thread type Non-polar U V S Positive common Z V NS Negative common NZ V r Pilot type Nil Rc F G N NPT T NPTF Terminal Block Nil Internal pilot R External pilot V Lead Wire * Only Nil is available for M5. Circular Connector * Select R, U, S, or Z for the valve when the SI unit output polarity is positive common.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

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(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Metal Seal/Rubber Seal Series VQ Body Ported

R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

NCQ2/CQ2

C BQ2B20-10DC-R C BQ2B40-10DC-R 65 70 75 80 120 145 170 70 75 80 85 120 145 170 70 75 80 85 110 135 160 75 80 85 90 115 140 165 CQ-M5 x 75L x 80L x 85L x 90L x 115L x 140L x 165L -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R x 70L x 75L x 80L x 120L x 145L x 170L CQ-M5 x 70L x 75L x 80L x 85L x 120L x 145L x 170L CQ-M5 x 70L x 75L x 80L x 85L x 110L x 135L

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Body size Port size M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK2P-M5M -01MS KK3P-01MS -02MS -03MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK2S-M5M -01MS KK3S-01MS -02MS -03MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications

0.4

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT100-1-P (4) P kit J kit G kit F kit VQZ w AXT100-1-J (4) U S AXT100-1-GU20 AXT100-1-F (4) e r VQD U S U S Note 1) Suffix -XP for dust-protected type SI unit.

Compact Cylinder

CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L R V 10.5 15 7.5 R V R V R V 9.5 15.5 12.5 R V R V 9 14.5 160 Series CQ2 Construction 20, 25 40 to 100 32 Replacement Parts/Seal Kit Kit no.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

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(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

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Note 2) V, S and R specifications are 45T, 45T1.