CATALOG VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10
: A8) B5 M5 x 0.8 v v B6 M6 x 1 v v v B8 M8 x 1.25 v v B01 Rc1/8 v v v N01 NPT1/8 v v v T01 NPTF1/8 v v v M5 x 0.8 v (uConnection thread: A8) 04 4 vV vV 06 6 vV vV vV 08 8 V vV Female thread One-touch fitting N4 For 4 nylon tubing1 N6 For 6 nylon tubing1 v v v U4 For 4 soft tubing2 U6 For 6 soft tubing2 v v v 1 Nylon tube piping 2 Soft nylon/Polyurethane tube piping u Connection thread
(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP
P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.
Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread Rod end male thread With rubber bumper P P P P P P P P P P P P Mounting Through-hole (Std.)
Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold
2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I
Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30
(Example) For M3: L2 = 6 mm Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37
Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common
(Example) For M3: L2 = 6 mm Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37
(Example) For M3: L2 = 6 mm Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37
Example) AF30-03B-2R-A-X64 Nq Body size 10 20 30 40 50 60 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V + Ne Port size Nr Option (Mounting) Nil Without mounting option V V V V V V B*3 With bracket V V V V V + Nil Polycarbonate bowl V V V V
Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24
V 2 x Rc P 4 x J GA F GA A MA a A MA a Cushion adjustment screw Air release R (max.)
(Example) For M3: L1 = 6mm Applicable shaft types: X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z J Z X Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37 Symbol
P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850
2-wire 100 V R73 V V v XC30 Fluorine grease W, J Connector R73C V V V V Grommet No 48 V, 100 V 100 V R80 V V v IC circuit Reed auto switch X5 For M5 port (90/180) W, J Connector 24 V or less R80C V V V V * Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN * Auto switches are shipped together, (but not
01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory