CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

V100

VV307-01-3--F P = 26 (Applicable cable O.D.)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

5-Port Solenoid Valve

X X 3(EB) 1(P) Port size (Metric/One-touch fittings) Symbol P, E port SY3000 SY5000 SY7000 L4 4 V V L6 6 V V V L8 8 V V L10 10 V L12 12 V 1(P) 2(B) (A)4 2(B) (A)4 2(B) (A)4 (A)4 2(B) (A)4 2(B) Connector Connecting Base Port size (Inch/One-touch fittings) Symbol P, E port SY3000 SY5000 SY7000 LN3 5/32" V LN7 1/4" V V LN9 5/16" V LN11 3/8" V D-sub, Flat Ribbon Port size (Metric

Table of Contents

Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] 1 (P) 1 (P) 5 (R1) 3 (R2) 3 (R) Apparent power VA 2 position double 2 position double AC (B) 2 (A) 4 (A) 4 (B) 2 Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) Surge voltage suppressor Indicator light 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) In common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

5 Port Solenoid Valve Series SY3000/5000/7000/9000

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9 20 SZ 8.6 P

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Table of Contents

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(R) port SUP (P) port Applicable solenoid valve VF3160-Side ported/Common EXH type Type 61 VV5F3 05 61 1 01 02 VF3163-01 02 Stations 02 2 stations 10 20 stations CYL (A, B) port SUP (P) port EXH port Top ported/Individual EXH type Type 70 Applicable solenoid valve VV5F3 05 70 3 01 02 VF370-CYL (A, B) port Stations 02 2 stations 10 20 stations EXH (R) port SUP (P) port Applicable solenoid

Table of Contents

ARJF310F-01 y e !

SYJ300/500/700

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

Table of Contents

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

Modular F.R.L. Units

Nq Body size 20 30 40 50 60 Symbol Description Nw Pipe thread type Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V + Ne Port size a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option Nr Nil Without auto drain V V V V V C*4 N.C.

One-touch Fittings

2 3.2 4 6 8 10 12 16 V V V V V V How to Order P.174 Variations P.175 Dimensions P.176 Metric P.173 2 3.2 4 6 8 10 12 16 V V V V V V V How to Order P.186 Variations P.187 Dimensions P.188 Inch P.185 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V V How to Order P.196 Variations P.197 Dimensions P.198 Inch P.195 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V Gasket Seal (Uni Thread) Connection

EXxx-OMO0027

=None 1=2 value average 2=4 value average 3=8 value average 80xA:01 Channel 0 / Analogue average filter Enum0803 80xA:02 Channel 1 / Analogue average filter 80xB:0 Slot x: Range USINT 2 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA 80xB:01 Channel 0 / Analogue input range Enum0804 80xB:02 Channel 1 / Analogue input range : x: Slot No. -83No.EX-OMO0027-A Analogue