IIIIIII

in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

Mechanical Valves Series NVM, NVFM, NVZNI

in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Mist Separator Regulator

Bowl assembly / auto drain for AWM30-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: J Semi-standard: (Standard) (9) Part No. Piping port thread ty pe Piping port thread ty pe (9) Part No. Rc C3SF-J-D G C3SFF-J-D NPT C3SFN-J(Z)-D Rc G NPT C3SF(-Z)-D C3SF-D Appearance and part No.

Ｍ icro Mist Separator Regulator

Bowl assembly / auto drain for AWD30-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: J Semi-standard: (Standard) (9) Part No. Piping port thread ty pe Piping port thread ty pe (9) Part No. Rc C3SF-J-D G C3SFF-J-D NPT C3SFN-J(Z)-D Rc G NPT C3SF(-Z)-D C3SF-D Appearance and part No.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Z directions, for 2 hours each (De-energized) Vibration resistance 980 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance 2% F.S. or less (Based on 25C) Temperature characteristics Standards Compliant with CE marking, UL (CSA) Piping Specifications Model M3 M5 01 N01 R04 R06 IM5 M5 female thread, through type IM5H M5 female thread, through type (with mounting hole)

Vacuum Pad: Ball Joint Type

width across flats 14 Hexagon width across flats 19 3 3 I 5 5 D C J H I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 F M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) B Stroke: 10 mm A C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5

2-Color Display Digital Flow Switch Series PFM

Vibration resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Note: Flow rate unit is based on standard conditions (20C, 1 atm, 65% RH). 920 2-Color Display Digital Flow Switch Series PFM5 Piping Specifications / Mass Part no. 01 02 N01 N02 F01 C4 F02 C6 C6 N7 4 (5/32") one-touch fitting 8 (5/16") one-touch fitting 1/4" one-touch fitting 6 one-touch fitting Rc 1/4 NPT

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

y u u q w e r t q w e r t i i o o !

Compact Manifold Regulator Series ARM5

Y X X Y X 5 5 5.5 5 X Y Fitting size Fitting size Fitting size Fitting size 4, 5/32 4, 5/32 6 6 3 11.5 19 19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Compact and Lightweight

-N01-N01 12.7 12.7 12.7 67 42.5 27 26 NPT1/8 NPT1/8 NPT1/8 ZH07DA-N01-N01-N01 70.2 ZH10DA-N01-N01-N01 76.4 ZH13DA-N01-N02-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9 44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard

Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

AS

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 KE 5/32" 9.3 7 9.6 28.8 25.1 30.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" TMH 16 1/8" 27.5 20.4 9.3 12.7 5/32

2-Color Display High Precision

Piping 01/N01 A B D ZS-24-A ZS-24-B ZS-24-D ZS-35-C ZS-35-D ZS-35-F ZS-35-G Bracket A Bracket B Bracket D E E Panel mount adapter Panel mount adapter + Front protective cover F W1/WF1/M5/C4/C6 Output specifications R T S V X Y NPN open collector 2 outputs + Analog voltage/Auto-shift switching PNP open collector 2 outputs + Analog voltage/Auto-shift switching NPN open collector 2 outputs +

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

V

T O E J E C T O R S Y S T E M Filtration 30m Element Proof Differential Pressure 1.5 Bar / 20PSI Install to protect vacuum equipment, avoid reverse positive pressure blow.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.