Table of Contents

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

y u u q w e r t q w e r t i i o o !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

2-Color Display Digital Flow Switch Series PFM

With orifice: 10 to 150 Hz with a 1.5 mm amplitude or 19.6 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber seal Electrical entry Symbol Without Grommet (DC specification) L type plug connector with lead wire L type plug terminal without connector M type plug connector with lead wire M type plug terminal without connector DIN connector DIN terminal without connector DIN connector DIN terminal without connector G L LO M MO Y YO YZ YOS With Without With With(Without light) Note) Standard lead

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54 24 40.5 16.5 80 83 58 85 37 64 5 27.5 125 129 89 135 56 105 44 1213 Series ZPT/ZPX How to

VM

2 Stainless steel y POM Piston !

PSxx-OMM0006CN

-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1

Digital Pressure Switch ( compatible)

: 0 ISE20B-L-P: 4 ZSE20B-L(-M): 1 ZSE20B-L-P: 4 ZSE20BF-L(-M): 1 Unit (Selection of display unit) 0x03E8 (1000) 0 R/W Y U8 ZSE20BF-L-P: 4 NorP (Selection of PNP/NPN) Setting of switch output specification 0: NPN 1: PNP 0x03E9 (1001) 0 R/W Y U8 0x01 (1) Setting of display color 0: red (Constantly red) 1: Grn (Constantly green) 2: 1SoG CoL (Selection of display color) (OUT1 turns green at ON

Filter Regulator

D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

PSE540/560

between live parts and case (at 500 VDC) 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Impact resistance Temperature characteristics 2% F.S. or less (based on 25C) Piping Specifications R04 N01 Model M3 M5 01 R06 IM5 IM5H

IIIIIII

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

Mechanical Valves Series NVM, NVFM, NVZNI

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

y u u q w e r t q w e r t i i o o !

30

21.4 24.9 M L Q A D D O N M M Note 1) D is maximum diameter.

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

44

M L M 17 17 33.6 7.6 17 17 37 8.5 22 22 39.4 9.3 Union Tee: KFG2T Applicable tubing size (mm) O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

9.8

s2 in X, Y, Z directions for 2 hours each (De-energized) Vibration resistance 100 m/s2 in X, Y, Z directions 3 times each (De-energized) Impact resistance 2% F.S.