1

13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120

CRBU

(mm) (mm) Size 10 15 20 30 Y 1 to 8 1.5 to 9 1.5 to 10 2 to13 X 1 to 14 1.5 to 18 1.5 to 20 2 to 22 Y 1 to 8 1.5 to 9 1.5 to10 2 to 13 Size 10 15 20 30 Symbol: A20 Symbol: A21 Symbol: A22 The shaft can be further shortened by machining a round shoulder and double flats on the short end of the shaft. (If the shaft is not to be shortened, leave Y dimension blank.)

IP8001 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 13 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

IP8101 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 12 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT5SF (5.5 Stage), Guide Attachment: None, Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 5.5 Stage, Guide Attachment: None, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

HRX-OM-Q040_E

HRS-PF001, HRS-PF002 HRS01-A-10-, HRS01-W-10HRS050-A20-, HRS050-W-20Particle Filter Set HRS01-A-20-, HRS01-W-20HRS060-A20-, HRS060-W-20HRS024-A-20-, HRS024-W-20Thermo-chiller HRS030-A-20-, HRS030-W-20Caution HRS040-A-20-, HRS040-W-20Applicable model: HRS Series Mounting of the case should be performed by hand-tighten.

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: W (w/Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 50 (ø50), Stage: JT2SF (2.5 Stage), Guide Attachment: WM (w/Mesh Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 32 (ø32), Stage: JT2SF (2.5 Stage), Guide Attachment: W (w/Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: W (w/Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Attachment, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø50, Stage: 2.5 Stage, Guide Attachment: w/Mesh Attachment, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø32, Stage: 2.5 Stage, Guide Attachment: w/Attachment, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø40, Stage: 2.5 Stage, Guide Attachment: w/Attachment, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Adapter Material: Stainless Steel, Stainless Steel 304, Adapter: 5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter, Pad Diameter: ø40, Stage: 2.5 Stage, Guide Attachment: w/Flat Attachment, Connection Thread: M20 x 1, Plate Mounting, Male Thread, Vacuum Inlet: NPT1/4, Female Thread

Compact Cylinder

(mm) 12 16 20 25 5 to 30 32.2 25.2 6 6 25 M3 x 0.5 32 5 3.5 15.5 3.5 6.5 depth 3.5 10 5 to 30 33 26 8 8 29 M4 x 0.7 38 6 3.5 20 3.5 6.5 depth 3.5 10 10 5 to 50 35 26 7 10 36 M5 x 0.8 47 8 4.5 25.5 5.5 9 depth 7 9.5 10 5 to 50 39 29 12 12 40 M6 x 1.0 52 10 5 28 5.5 9 depth 7 11 10 Note 2) The external dimensions with rubber bumper are same as those of the standard, as shown above.

ISO Cylinder

5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-M9l D-A9l*2 10

Rotary Actuator/Vane Type

-4 P211070-10 15 P611090-1 P811020-3 P811020-4 P211090-10 20 P611060-1 P611060-8 P811030-3 P811030-4 P211060-10 30 P611080-1 P811040-3 P811040-4 P211080-10 40 P611010-1 P611010-8 P611010-9 P811050-3 P811050-4 P211010-10 *1.