Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

This is a legacy product, and replaced byZM131HT-K3LZ, VACUUM GENERATOR *LQA, VACUUM SERIES, ZM VACUUM SYSTEM, DD, ZM NOZZLE SIZE 1.3, .51700 lb, ModelStandard Supply PressureMax. Vacuum PressureMax. Suction FlowAir ConsumptionNZM13?H5Kgf/cm2 / 75PSI?630mmHg4095

This is a legacy product, and replaced byZM131HT-K3LZ-E55L, VACUUM GEN, HIGH PRESS/AC, VACUUM SERIES, ZM VACUUM SYSTEM, DD, ZM NOZZLE SIZE 1.3, .51700 lb, ModelStandard Supply PressureMax. Vacuum PressureMax. Suction FlowAir ConsumptionNZM13?H5Kgf/cm2 / 75PSI?630mmHg4095

This is a legacy product, and replaced byZM133HT-K3LZ, VACUUM GEN, HIGH PRESS/AC *LQA, VACUUM SERIES, ZM VACUUM SYSTEM, DD, ZM NOZZLE SIZE 1.3, .52603 lb, ModelStandard Supply PressureMax. Vacuum PressureMax. Suction FlowAir ConsumptionNZM13?H5Kgf/cm2 / 75PSI?630mmHg4095

Nozzle Diameter: ø1.0, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 110VAC 50/60Hz, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual

Nozzle Diameter: ø1.3, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 110VAC 50/60Hz, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 3 (110VAC 50/60Hz), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21

AC Servo Motor Driver

M9039 Programmable controller ready Y1D PC RUN Home position return mode Y31 X20 X27 Clear (CR) ON timer request M20 PLS ABS transfer mode Positioning completion Home position return start switch M20 K1 Clear (CR) 100ms ON timer T10 Clear signal ON timer request M21 Setting data set type home position return request M21 SET Data set type home position return request T10 Resetting data set

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

AC Servo Motor Driver (CC-Link Type ）

Remote input Address E0H RX0F to RX00 Station No.1 1 Station FROM command E1H RX1F to RX10 M15 M10 M5 M0 RXF to RX0 * 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 E2H RX2F to RX20 2 Station E3H RX3F to RX30 Station No.2 E4H RX4F to RX40 In position Ready 3 Station E5H RX5F to RX50 M31 M26 M21 M16 RX1F to RX10 * * * * * * * * * * * * * * 1 0 15EH RX7EF to RX7E0 64 Station 15FH RX7FF to RX7F0 driver.

LEC-OM02704CN

M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG) M11(BWNG) M12(MEND) M13 (DB) M14(POT) M15 M16 M17 M18 M19 M20 M21 M22 M23 M24 M25 M26(ALM) M27Ready(CRD) M28 M29 M30 M31 10 7.1.3 RY(160H1DFH)1 2 X20ON ON (RY00) 2 (RY0B) /(RY06) 10ms *1 (RY01) 10ms *1 M100M131

AC Servo Motor Driver (CC-Link Type ）

Remote input Address E0H RX0F to RX00 Station No.1 1 Station FROM command E1H RX1F to RX10 M15 M10 M5 M0 RXF to RX0 * 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 E2H RX2F to RX20 2 Station E3H RX3F to RX30 Station No.2 E4H RX4F to RX40 In position Ready 3 Station E5H RX5F to RX50 M31 M26 M21 M16 RX1F to RX10 * * * * * * * * * * * * * * 1 0 15EH RX7EF to RX7E0 64 Station 15FH RX7FF to RX7F0 driver.

Table of Contents

1 point setting/without analog output/200 degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

1 point setting/without analog output/200 degrees setting Solid state (12 to 24 VDC) 6 For manifold, individual SUP 2 point setting/without analog output/3 rotation setting 2 point setting/without analog output /200 degrees setting Silencer 1 point setting/analog output/3 rotation setting Nil S High noise reduction type Standard type E19 1 point setting/analog output/200 degrees setting M21

+ Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: A (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21